JPS57118106A - Measuring device for film thickness of thick film hybrid ic or the like - Google Patents

Measuring device for film thickness of thick film hybrid ic or the like

Info

Publication number
JPS57118106A
JPS57118106A JP304681A JP304681A JPS57118106A JP S57118106 A JPS57118106 A JP S57118106A JP 304681 A JP304681 A JP 304681A JP 304681 A JP304681 A JP 304681A JP S57118106 A JPS57118106 A JP S57118106A
Authority
JP
Japan
Prior art keywords
mode
focusing
rough
fine
focusing mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP304681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6219681B2 (enExample
Inventor
Hiroshi Makihira
Yoshisada Oshida
Yukio Uto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP304681A priority Critical patent/JPS57118106A/ja
Publication of JPS57118106A publication Critical patent/JPS57118106A/ja
Publication of JPS6219681B2 publication Critical patent/JPS6219681B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP304681A 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like Granted JPS57118106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP304681A JPS57118106A (en) 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP304681A JPS57118106A (en) 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like

Publications (2)

Publication Number Publication Date
JPS57118106A true JPS57118106A (en) 1982-07-22
JPS6219681B2 JPS6219681B2 (enExample) 1987-04-30

Family

ID=11546364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP304681A Granted JPS57118106A (en) 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like

Country Status (1)

Country Link
JP (1) JPS57118106A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138222A (ja) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Ｔ．ｔ．ｌ焦点検出装置を有するカメラの照明装置
JPS61235808A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 自動焦点合せ方法及び装置
JPS62261907A (ja) * 1986-05-09 1987-11-14 Disco Abrasive Syst Ltd オ−トフオ−カスによる厚さ等の計測方法
JPH0225710A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd パターン検査方法
JP2005324300A (ja) * 2004-05-17 2005-11-24 J-Net:Kk 極細工作具の測定装置、及びその測定装置を用いた基準位置設定装置及び傾き測定装置
JP2007155379A (ja) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology 三次元形状計測装置および三次元形状計測方法
JP2022097164A (ja) * 2020-12-18 2022-06-30 キヤノン株式会社 計測装置、露光装置、および物品製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138222A (ja) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Ｔ．ｔ．ｌ焦点検出装置を有するカメラの照明装置
JPS61235808A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 自動焦点合せ方法及び装置
JPS62261907A (ja) * 1986-05-09 1987-11-14 Disco Abrasive Syst Ltd オ−トフオ−カスによる厚さ等の計測方法
JPH0225710A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd パターン検査方法
JP2005324300A (ja) * 2004-05-17 2005-11-24 J-Net:Kk 極細工作具の測定装置、及びその測定装置を用いた基準位置設定装置及び傾き測定装置
JP2007155379A (ja) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology 三次元形状計測装置および三次元形状計測方法
JP2022097164A (ja) * 2020-12-18 2022-06-30 キヤノン株式会社 計測装置、露光装置、および物品製造方法

Also Published As

Publication number Publication date
JPS6219681B2 (enExample) 1987-04-30

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