JPS57118106A - Measuring device for film thickness of thick film hybrid ic or the like - Google Patents

Measuring device for film thickness of thick film hybrid ic or the like

Info

Publication number
JPS57118106A
JPS57118106A JP304681A JP304681A JPS57118106A JP S57118106 A JPS57118106 A JP S57118106A JP 304681 A JP304681 A JP 304681A JP 304681 A JP304681 A JP 304681A JP S57118106 A JPS57118106 A JP S57118106A
Authority
JP
Japan
Prior art keywords
mode
focusing
rough
fine
focusing mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP304681A
Other languages
English (en)
Other versions
JPS6219681B2 (ja
Inventor
Hiroshi Makihira
Yoshisada Oshida
Yukio Uto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP304681A priority Critical patent/JPS57118106A/ja
Publication of JPS57118106A publication Critical patent/JPS57118106A/ja
Publication of JPS6219681B2 publication Critical patent/JPS6219681B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP304681A 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like Granted JPS57118106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP304681A JPS57118106A (en) 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP304681A JPS57118106A (en) 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like

Publications (2)

Publication Number Publication Date
JPS57118106A true JPS57118106A (en) 1982-07-22
JPS6219681B2 JPS6219681B2 (ja) 1987-04-30

Family

ID=11546364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP304681A Granted JPS57118106A (en) 1981-01-14 1981-01-14 Measuring device for film thickness of thick film hybrid ic or the like

Country Status (1)

Country Link
JP (1) JPS57118106A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138222A (ja) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Ｔ．ｔ．ｌ焦点検出装置を有するカメラの照明装置
JPS61235808A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 自動焦点合せ方法及び装置
JPS62261907A (ja) * 1986-05-09 1987-11-14 Disco Abrasive Syst Ltd オ−トフオ−カスによる厚さ等の計測方法
JPH0225710A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd パターン検査方法
JP2005324300A (ja) * 2004-05-17 2005-11-24 J-Net:Kk 極細工作具の測定装置、及びその測定装置を用いた基準位置設定装置及び傾き測定装置
JP2007155379A (ja) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology 三次元形状計測装置および三次元形状計測方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138222A (ja) * 1984-12-11 1986-06-25 Minolta Camera Co Ltd Ｔ．ｔ．ｌ焦点検出装置を有するカメラの照明装置
JPS61235808A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 自動焦点合せ方法及び装置
JPS62261907A (ja) * 1986-05-09 1987-11-14 Disco Abrasive Syst Ltd オ−トフオ−カスによる厚さ等の計測方法
JPH0225710A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd パターン検査方法
JP2005324300A (ja) * 2004-05-17 2005-11-24 J-Net:Kk 極細工作具の測定装置、及びその測定装置を用いた基準位置設定装置及び傾き測定装置
JP2007155379A (ja) * 2005-12-01 2007-06-21 Tokyo Univ Of Agriculture & Technology 三次元形状計測装置および三次元形状計測方法

Also Published As

Publication number Publication date
JPS6219681B2 (ja) 1987-04-30

Similar Documents

Publication Publication Date Title
NL186353C (nl) Inrichting voor het afbeelden van een maskerpatroon op een substraat voorzien van een opto-elektronisch detektiestelsel voor het bepalen van een afwijking tussen het beeldvlak van een projektielenzenstelsel en het substraatvlak.
JPS5218132A (en) Binary circuit
JPS57118106A (en) Measuring device for film thickness of thick film hybrid ic or the like
JPS5387217A (en) Focusing device
EP0306275A3 (en) Photoelectron image projection apparatus
FI891349A (fi) Automatisk reglering av bildskaorpa i bildroer.
JPS5286038A (en) Ticket process device
JPS5412488A (en) Method of detecting drum flange hole position
JPS56154604A (en) Measuring method and device for mesh image density or mesh area rate
JPS533848A (en) Automatic position measurement device
JPS5612729A (en) ?alignmening device for ic projection exposure equipment
JPS5346755A (en) Thickness detector of plate form objects
JPS5322759A (en) Thickness de tector of plate form objects
JPS5339137A (en) Electronic photograph fixing apparatus
JPS5349436A (en) Picture density control method for electronic copier
JPS542073A (en) Alignment unit
JPS5327449A (en) Thickness measuring system for running body
JPS5792835A (en) Detection of etching finishing point and device thereof
JPS54136888A (en) Surface defect detecting device
JPS5320933A (en) Cleaning device for photo-sensitive body
JPS57148239A (en) Detecting method for wiring pattern of printed circuit board
JPS57119205A (en) Measurement of sectional shape of plate-shaped body
JPS52125389A (en) Defect inspection apparatus
JPS5381151A (en) Surface film thickness detector
JPS5285841A (en) Pattern position determining apparatus