JPS5388750A - Device for detecting surface membrane thickness - Google Patents
Device for detecting surface membrane thicknessInfo
- Publication number
- JPS5388750A JPS5388750A JP235577A JP235577A JPS5388750A JP S5388750 A JPS5388750 A JP S5388750A JP 235577 A JP235577 A JP 235577A JP 235577 A JP235577 A JP 235577A JP S5388750 A JPS5388750 A JP S5388750A
- Authority
- JP
- Japan
- Prior art keywords
- surface membrane
- membrane thickness
- detecting surface
- membrane
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To accurately measure the thickness of membrane of a material to be inspected moving for long distance by converting Fraunhofer's diffraction images at the same place before and after treating the surface membrane to an electric signal to obtain the difference of both the signals without contact.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP235577A JPS5388750A (en) | 1977-01-14 | 1977-01-14 | Device for detecting surface membrane thickness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP235577A JPS5388750A (en) | 1977-01-14 | 1977-01-14 | Device for detecting surface membrane thickness |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5388750A true JPS5388750A (en) | 1978-08-04 |
Family
ID=11526953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP235577A Pending JPS5388750A (en) | 1977-01-14 | 1977-01-14 | Device for detecting surface membrane thickness |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5388750A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01291104A (en) * | 1988-05-19 | 1989-11-22 | Sumitomo Heavy Ind Ltd | Film thickness measuring instrument for resin film |
JP2007232489A (en) * | 2006-02-28 | 2007-09-13 | Kyushu Institute Of Technology | Precision tool measuring method and system using laser beam |
-
1977
- 1977-01-14 JP JP235577A patent/JPS5388750A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01291104A (en) * | 1988-05-19 | 1989-11-22 | Sumitomo Heavy Ind Ltd | Film thickness measuring instrument for resin film |
JP2007232489A (en) * | 2006-02-28 | 2007-09-13 | Kyushu Institute Of Technology | Precision tool measuring method and system using laser beam |
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