JPS5388750A - Device for detecting surface membrane thickness - Google Patents

Device for detecting surface membrane thickness

Info

Publication number
JPS5388750A
JPS5388750A JP235577A JP235577A JPS5388750A JP S5388750 A JPS5388750 A JP S5388750A JP 235577 A JP235577 A JP 235577A JP 235577 A JP235577 A JP 235577A JP S5388750 A JPS5388750 A JP S5388750A
Authority
JP
Japan
Prior art keywords
surface membrane
membrane thickness
detecting surface
membrane
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP235577A
Other languages
Japanese (ja)
Inventor
Susumu Murata
Haruo Sabauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP235577A priority Critical patent/JPS5388750A/en
Publication of JPS5388750A publication Critical patent/JPS5388750A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To accurately measure the thickness of membrane of a material to be inspected moving for long distance by converting Fraunhofer's diffraction images at the same place before and after treating the surface membrane to an electric signal to obtain the difference of both the signals without contact.
COPYRIGHT: (C)1978,JPO&Japio
JP235577A 1977-01-14 1977-01-14 Device for detecting surface membrane thickness Pending JPS5388750A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP235577A JPS5388750A (en) 1977-01-14 1977-01-14 Device for detecting surface membrane thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP235577A JPS5388750A (en) 1977-01-14 1977-01-14 Device for detecting surface membrane thickness

Publications (1)

Publication Number Publication Date
JPS5388750A true JPS5388750A (en) 1978-08-04

Family

ID=11526953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP235577A Pending JPS5388750A (en) 1977-01-14 1977-01-14 Device for detecting surface membrane thickness

Country Status (1)

Country Link
JP (1) JPS5388750A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01291104A (en) * 1988-05-19 1989-11-22 Sumitomo Heavy Ind Ltd Film thickness measuring instrument for resin film
JP2007232489A (en) * 2006-02-28 2007-09-13 Kyushu Institute Of Technology Precision tool measuring method and system using laser beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01291104A (en) * 1988-05-19 1989-11-22 Sumitomo Heavy Ind Ltd Film thickness measuring instrument for resin film
JP2007232489A (en) * 2006-02-28 2007-09-13 Kyushu Institute Of Technology Precision tool measuring method and system using laser beam

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