Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP15691976ApriorityCriticalpatent/JPS5919299B2/en
Publication of JPS5381176ApublicationCriticalpatent/JPS5381176A/en
Publication of JPS5919299B2publicationCriticalpatent/JPS5919299B2/en
PURPOSE: To perform non-destructive and contactless measurement of the degrees of vacuum with sufficient reliability by applying a strong electric field to the vacuum system to be measured and measuring the potential of the potential detecting conductor provided within this electric field.