JPS57114660A - Manufacture of be alloy sheet - Google Patents
Manufacture of be alloy sheetInfo
- Publication number
- JPS57114660A JPS57114660A JP11386681A JP11386681A JPS57114660A JP S57114660 A JPS57114660 A JP S57114660A JP 11386681 A JP11386681 A JP 11386681A JP 11386681 A JP11386681 A JP 11386681A JP S57114660 A JPS57114660 A JP S57114660A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- manufacture
- thin
- crystal system
- atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0005—Separation of the coating from the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Heat Treatment Of Nonferrous Metals Or Alloys (AREA)
Abstract
PURPOSE:To manufacture a homogeneous thin Be alloy film for acoustic instruments wuth superior strength by vapor-depositing a material consisting of Be and other element different from Be in crystal system by an ion plating method. CONSTITUTION:A material for vapor deposition consisting of Be and 0.7-5% other element different from Be in crystal system such as Al, Cr or B is put in a source container in an evacuated chamber. The elements are melted by heating with an electron beam irradiation heater set in the chamber to evaporate atoms of the element. The atoms are ionized, accelerated, and stuck to the surface of a substrate set in the chamber to form a thin film. The substrate is then removed by dissolution. Thus, a thin Be alloy film is manufactured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11386681A JPS57114660A (en) | 1981-07-20 | 1981-07-20 | Manufacture of be alloy sheet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11386681A JPS57114660A (en) | 1981-07-20 | 1981-07-20 | Manufacture of be alloy sheet |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11966078A Division JPS5462911A (en) | 1978-09-27 | 1978-09-27 | Production of thin plate of be alloy |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57114660A true JPS57114660A (en) | 1982-07-16 |
Family
ID=14623055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11386681A Pending JPS57114660A (en) | 1981-07-20 | 1981-07-20 | Manufacture of be alloy sheet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57114660A (en) |
-
1981
- 1981-07-20 JP JP11386681A patent/JPS57114660A/en active Pending
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