JPS57114660A - Manufacture of be alloy sheet - Google Patents

Manufacture of be alloy sheet

Info

Publication number
JPS57114660A
JPS57114660A JP11386681A JP11386681A JPS57114660A JP S57114660 A JPS57114660 A JP S57114660A JP 11386681 A JP11386681 A JP 11386681A JP 11386681 A JP11386681 A JP 11386681A JP S57114660 A JPS57114660 A JP S57114660A
Authority
JP
Japan
Prior art keywords
chamber
manufacture
thin
crystal system
atoms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11386681A
Other languages
Japanese (ja)
Inventor
Kunio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Gakki Co Ltd
Original Assignee
Nippon Gakki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Gakki Co Ltd filed Critical Nippon Gakki Co Ltd
Priority to JP11386681A priority Critical patent/JPS57114660A/en
Publication of JPS57114660A publication Critical patent/JPS57114660A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Heat Treatment Of Nonferrous Metals Or Alloys (AREA)

Abstract

PURPOSE:To manufacture a homogeneous thin Be alloy film for acoustic instruments wuth superior strength by vapor-depositing a material consisting of Be and other element different from Be in crystal system by an ion plating method. CONSTITUTION:A material for vapor deposition consisting of Be and 0.7-5% other element different from Be in crystal system such as Al, Cr or B is put in a source container in an evacuated chamber. The elements are melted by heating with an electron beam irradiation heater set in the chamber to evaporate atoms of the element. The atoms are ionized, accelerated, and stuck to the surface of a substrate set in the chamber to form a thin film. The substrate is then removed by dissolution. Thus, a thin Be alloy film is manufactured.
JP11386681A 1981-07-20 1981-07-20 Manufacture of be alloy sheet Pending JPS57114660A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11386681A JPS57114660A (en) 1981-07-20 1981-07-20 Manufacture of be alloy sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11386681A JPS57114660A (en) 1981-07-20 1981-07-20 Manufacture of be alloy sheet

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11966078A Division JPS5462911A (en) 1978-09-27 1978-09-27 Production of thin plate of be alloy

Publications (1)

Publication Number Publication Date
JPS57114660A true JPS57114660A (en) 1982-07-16

Family

ID=14623055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11386681A Pending JPS57114660A (en) 1981-07-20 1981-07-20 Manufacture of be alloy sheet

Country Status (1)

Country Link
JP (1) JPS57114660A (en)

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