JPS5694633A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5694633A JPS5694633A JP17071579A JP17071579A JPS5694633A JP S5694633 A JPS5694633 A JP S5694633A JP 17071579 A JP17071579 A JP 17071579A JP 17071579 A JP17071579 A JP 17071579A JP S5694633 A JPS5694633 A JP S5694633A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transformation
- sio2
- si3n4
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17071579A JPS5694633A (en) | 1979-12-27 | 1979-12-27 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17071579A JPS5694633A (en) | 1979-12-27 | 1979-12-27 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5694633A true JPS5694633A (en) | 1981-07-31 |
Family
ID=15910047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17071579A Pending JPS5694633A (en) | 1979-12-27 | 1979-12-27 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5694633A (ja) |
-
1979
- 1979-12-27 JP JP17071579A patent/JPS5694633A/ja active Pending
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