JPS5693315A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5693315A JPS5693315A JP17001079A JP17001079A JPS5693315A JP S5693315 A JPS5693315 A JP S5693315A JP 17001079 A JP17001079 A JP 17001079A JP 17001079 A JP17001079 A JP 17001079A JP S5693315 A JPS5693315 A JP S5693315A
- Authority
- JP
- Japan
- Prior art keywords
- film
- region
- polycrystalline
- regions
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17001079A JPS5693315A (en) | 1979-12-26 | 1979-12-26 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17001079A JPS5693315A (en) | 1979-12-26 | 1979-12-26 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5693315A true JPS5693315A (en) | 1981-07-28 |
JPS6145392B2 JPS6145392B2 (ja) | 1986-10-07 |
Family
ID=15896908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17001079A Granted JPS5693315A (en) | 1979-12-26 | 1979-12-26 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5693315A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61180482A (ja) * | 1984-11-28 | 1986-08-13 | フエアチアイルド カメラ アンド インストルメント コ−ポレ−シヨン | バイポーラトランジスタを製造する方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0340791Y2 (ja) * | 1986-09-24 | 1991-08-27 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5627965A (en) * | 1979-08-15 | 1981-03-18 | Nec Corp | Manufacture of semiconductor device |
-
1979
- 1979-12-26 JP JP17001079A patent/JPS5693315A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5627965A (en) * | 1979-08-15 | 1981-03-18 | Nec Corp | Manufacture of semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61180482A (ja) * | 1984-11-28 | 1986-08-13 | フエアチアイルド カメラ アンド インストルメント コ−ポレ−シヨン | バイポーラトランジスタを製造する方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6145392B2 (ja) | 1986-10-07 |
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