JPS5690432A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS5690432A
JPS5690432A JP16731579A JP16731579A JPS5690432A JP S5690432 A JPS5690432 A JP S5690432A JP 16731579 A JP16731579 A JP 16731579A JP 16731579 A JP16731579 A JP 16731579A JP S5690432 A JPS5690432 A JP S5690432A
Authority
JP
Japan
Prior art keywords
ferromagnetic material
substrate
gas
ion source
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16731579A
Other languages
English (en)
Other versions
JPS5948450B2 (ja
Inventor
Tsunemi Oiwa
Soichi Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OOSAKAFU
Maxell Holdings Ltd
Osaka Prefecture
Original Assignee
OOSAKAFU
Osaka Prefecture
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OOSAKAFU, Osaka Prefecture, Hitachi Maxell Ltd filed Critical OOSAKAFU
Priority to JP16731579A priority Critical patent/JPS5948450B2/ja
Publication of JPS5690432A publication Critical patent/JPS5690432A/ja
Publication of JPS5948450B2 publication Critical patent/JPS5948450B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP16731579A 1979-12-22 1979-12-22 磁気記録媒体の製造方法 Expired JPS5948450B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16731579A JPS5948450B2 (ja) 1979-12-22 1979-12-22 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16731579A JPS5948450B2 (ja) 1979-12-22 1979-12-22 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS5690432A true JPS5690432A (en) 1981-07-22
JPS5948450B2 JPS5948450B2 (ja) 1984-11-27

Family

ID=15847463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16731579A Expired JPS5948450B2 (ja) 1979-12-22 1979-12-22 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS5948450B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812317A (ja) * 1981-07-15 1983-01-24 Sony Corp 薄膜磁気媒体の製法
JPS59201228A (ja) * 1983-04-28 1984-11-14 Tdk Corp 磁気記録媒体の製造方法
JPS59213033A (ja) * 1983-05-18 1984-12-01 Ulvac Corp 垂直磁気記録体の製造法
JPS6085439A (ja) * 1983-10-18 1985-05-14 Nippon Mining Co Ltd 磁気記録媒体の製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812317A (ja) * 1981-07-15 1983-01-24 Sony Corp 薄膜磁気媒体の製法
JPH033369B2 (ja) * 1981-07-15 1991-01-18 Sony Corp
JPS59201228A (ja) * 1983-04-28 1984-11-14 Tdk Corp 磁気記録媒体の製造方法
JPS59213033A (ja) * 1983-05-18 1984-12-01 Ulvac Corp 垂直磁気記録体の製造法
JPH0320815B2 (ja) * 1983-05-18 1991-03-20 Ulvac Corp
JPS6085439A (ja) * 1983-10-18 1985-05-14 Nippon Mining Co Ltd 磁気記録媒体の製造方法

Also Published As

Publication number Publication date
JPS5948450B2 (ja) 1984-11-27

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