JPS5527868A - Production of zinc oxide thin film - Google Patents

Production of zinc oxide thin film

Info

Publication number
JPS5527868A
JPS5527868A JP10095378A JP10095378A JPS5527868A JP S5527868 A JPS5527868 A JP S5527868A JP 10095378 A JP10095378 A JP 10095378A JP 10095378 A JP10095378 A JP 10095378A JP S5527868 A JPS5527868 A JP S5527868A
Authority
JP
Japan
Prior art keywords
zinc oxide
thin film
zinc
oxide thin
lumpy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10095378A
Other languages
Japanese (ja)
Other versions
JPS5618537B2 (en
Inventor
Toshiki Mizoguchi
Toshinori Takagi
Kakuei Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP10095378A priority Critical patent/JPS5527868A/en
Publication of JPS5527868A publication Critical patent/JPS5527868A/en
Publication of JPS5618537B2 publication Critical patent/JPS5618537B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To obtain efficiently and cheaply a high quality zinc oxide thin film at a higher deposition speed by jetting ozone into a bell jar to oxidize zinc vapor and by depositing the resulting zinc oxide on a substrates.
CONSTITUTION: Zinc 13 is charged into closed crucible 12 set in bell jat 11 kept under a suitable atmospher such as a vacuum. Zinc 13 is heated with electron radiating filament coils 14, vaporized, and reacted with ozone jetted from a nozzle. Part of the resulting zinc oxide is converted into lumpy atom groups 16 with electron radiated from electrode 7, ionized, accelerated with the voltages of electrode 19 and substrate 18, and deposited on substrate 18 together with neutral lumpy atom groups 16. The kinetic energy is larger than that of a conventional sputtering method by two figures or more, a zinc oxide thin film is formed efficiently, and the production cost is reduced since a conventioal device can be utilized as it is.
COPYRIGHT: (C)1980,JPO&Japio
JP10095378A 1978-08-21 1978-08-21 Production of zinc oxide thin film Granted JPS5527868A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10095378A JPS5527868A (en) 1978-08-21 1978-08-21 Production of zinc oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10095378A JPS5527868A (en) 1978-08-21 1978-08-21 Production of zinc oxide thin film

Publications (2)

Publication Number Publication Date
JPS5527868A true JPS5527868A (en) 1980-02-28
JPS5618537B2 JPS5618537B2 (en) 1981-04-30

Family

ID=14287711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10095378A Granted JPS5527868A (en) 1978-08-21 1978-08-21 Production of zinc oxide thin film

Country Status (1)

Country Link
JP (1) JPS5527868A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006115236A1 (en) * 2005-04-21 2006-11-02 Futaba Corporation Vapor deposition

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5885028A (en) * 1981-11-16 1983-05-21 Matsushita Electric Ind Co Ltd Combustion device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112488A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Method of producing a zinc oxide film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112488A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Method of producing a zinc oxide film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006115236A1 (en) * 2005-04-21 2006-11-02 Futaba Corporation Vapor deposition
JP2008063590A (en) * 2005-04-21 2008-03-21 Futaba Corp Vapor deposition apparatus

Also Published As

Publication number Publication date
JPS5618537B2 (en) 1981-04-30

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