JPS5527868A - Production of zinc oxide thin film - Google Patents
Production of zinc oxide thin filmInfo
- Publication number
- JPS5527868A JPS5527868A JP10095378A JP10095378A JPS5527868A JP S5527868 A JPS5527868 A JP S5527868A JP 10095378 A JP10095378 A JP 10095378A JP 10095378 A JP10095378 A JP 10095378A JP S5527868 A JPS5527868 A JP S5527868A
- Authority
- JP
- Japan
- Prior art keywords
- zinc oxide
- thin film
- zinc
- oxide thin
- lumpy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: To obtain efficiently and cheaply a high quality zinc oxide thin film at a higher deposition speed by jetting ozone into a bell jar to oxidize zinc vapor and by depositing the resulting zinc oxide on a substrates.
CONSTITUTION: Zinc 13 is charged into closed crucible 12 set in bell jat 11 kept under a suitable atmospher such as a vacuum. Zinc 13 is heated with electron radiating filament coils 14, vaporized, and reacted with ozone jetted from a nozzle. Part of the resulting zinc oxide is converted into lumpy atom groups 16 with electron radiated from electrode 7, ionized, accelerated with the voltages of electrode 19 and substrate 18, and deposited on substrate 18 together with neutral lumpy atom groups 16. The kinetic energy is larger than that of a conventional sputtering method by two figures or more, a zinc oxide thin film is formed efficiently, and the production cost is reduced since a conventioal device can be utilized as it is.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10095378A JPS5527868A (en) | 1978-08-21 | 1978-08-21 | Production of zinc oxide thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10095378A JPS5527868A (en) | 1978-08-21 | 1978-08-21 | Production of zinc oxide thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5527868A true JPS5527868A (en) | 1980-02-28 |
JPS5618537B2 JPS5618537B2 (en) | 1981-04-30 |
Family
ID=14287711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10095378A Granted JPS5527868A (en) | 1978-08-21 | 1978-08-21 | Production of zinc oxide thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5527868A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006115236A1 (en) * | 2005-04-21 | 2006-11-02 | Futaba Corporation | Vapor deposition |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5885028A (en) * | 1981-11-16 | 1983-05-21 | Matsushita Electric Ind Co Ltd | Combustion device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112488A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Method of producing a zinc oxide film |
-
1978
- 1978-08-21 JP JP10095378A patent/JPS5527868A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112488A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Method of producing a zinc oxide film |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006115236A1 (en) * | 2005-04-21 | 2006-11-02 | Futaba Corporation | Vapor deposition |
JP2008063590A (en) * | 2005-04-21 | 2008-03-21 | Futaba Corp | Vapor deposition apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5618537B2 (en) | 1981-04-30 |
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