JPS51112488A - Method of producing a zinc oxide film - Google Patents

Method of producing a zinc oxide film

Info

Publication number
JPS51112488A
JPS51112488A JP50036598A JP3659875A JPS51112488A JP S51112488 A JPS51112488 A JP S51112488A JP 50036598 A JP50036598 A JP 50036598A JP 3659875 A JP3659875 A JP 3659875A JP S51112488 A JPS51112488 A JP S51112488A
Authority
JP
Japan
Prior art keywords
zinc oxide
producing
oxide film
films
permeability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50036598A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
Yasuhiro Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50036598A priority Critical patent/JPS51112488A/en
Publication of JPS51112488A publication Critical patent/JPS51112488A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

PURPOSE:To provide a method of producing zinc oxide films, which enables a reaction rate to be increased to a practicable level without lowering the permeability of the films.
JP50036598A 1975-03-28 1975-03-28 Method of producing a zinc oxide film Pending JPS51112488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50036598A JPS51112488A (en) 1975-03-28 1975-03-28 Method of producing a zinc oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50036598A JPS51112488A (en) 1975-03-28 1975-03-28 Method of producing a zinc oxide film

Publications (1)

Publication Number Publication Date
JPS51112488A true JPS51112488A (en) 1976-10-04

Family

ID=12474213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50036598A Pending JPS51112488A (en) 1975-03-28 1975-03-28 Method of producing a zinc oxide film

Country Status (1)

Country Link
JP (1) JPS51112488A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527868A (en) * 1978-08-21 1980-02-28 Toko Inc Production of zinc oxide thin film
JPS5550462A (en) * 1978-10-07 1980-04-12 Toko Inc Preparation of zinc oxide thin film
JPS57177971A (en) * 1981-04-28 1982-11-01 Yoichi Murayama High frequency ion plating device
JPS60165601A (en) * 1984-02-09 1985-08-28 Nippon Gakki Seizo Kk Holography device
JPS61132902A (en) * 1984-11-30 1986-06-20 Osaka Tokushu Gokin Kk Transparent film for blocking ultraviolet ray and infrared ray

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50119998A (en) * 1974-03-12 1975-09-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50119998A (en) * 1974-03-12 1975-09-19

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527868A (en) * 1978-08-21 1980-02-28 Toko Inc Production of zinc oxide thin film
JPS5618537B2 (en) * 1978-08-21 1981-04-30
JPS5550462A (en) * 1978-10-07 1980-04-12 Toko Inc Preparation of zinc oxide thin film
JPS57177971A (en) * 1981-04-28 1982-11-01 Yoichi Murayama High frequency ion plating device
JPS60165601A (en) * 1984-02-09 1985-08-28 Nippon Gakki Seizo Kk Holography device
JPH0433039B2 (en) * 1984-02-09 1992-06-01 Yamaha Corp
JPS61132902A (en) * 1984-11-30 1986-06-20 Osaka Tokushu Gokin Kk Transparent film for blocking ultraviolet ray and infrared ray
JPH0444721B2 (en) * 1984-11-30 1992-07-22 Oosaka Tokushu Gokin Kk

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