JPS5618537B2 - - Google Patents

Info

Publication number
JPS5618537B2
JPS5618537B2 JP10095378A JP10095378A JPS5618537B2 JP S5618537 B2 JPS5618537 B2 JP S5618537B2 JP 10095378 A JP10095378 A JP 10095378A JP 10095378 A JP10095378 A JP 10095378A JP S5618537 B2 JPS5618537 B2 JP S5618537B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10095378A
Other languages
Japanese (ja)
Other versions
JPS5527868A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10095378A priority Critical patent/JPS5527868A/en
Publication of JPS5527868A publication Critical patent/JPS5527868A/en
Publication of JPS5618537B2 publication Critical patent/JPS5618537B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP10095378A 1978-08-21 1978-08-21 Production of zinc oxide thin film Granted JPS5527868A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10095378A JPS5527868A (en) 1978-08-21 1978-08-21 Production of zinc oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10095378A JPS5527868A (en) 1978-08-21 1978-08-21 Production of zinc oxide thin film

Publications (2)

Publication Number Publication Date
JPS5527868A JPS5527868A (en) 1980-02-28
JPS5618537B2 true JPS5618537B2 (en) 1981-04-30

Family

ID=14287711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10095378A Granted JPS5527868A (en) 1978-08-21 1978-08-21 Production of zinc oxide thin film

Country Status (1)

Country Link
JP (1) JPS5527868A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0141909B2 (en) * 1981-11-16 1989-09-08 Matsushita Electric Ind Co Ltd

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4845416B2 (en) * 2005-04-21 2011-12-28 双葉電子工業株式会社 Vapor deposition equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112488A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Method of producing a zinc oxide film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112488A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Method of producing a zinc oxide film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0141909B2 (en) * 1981-11-16 1989-09-08 Matsushita Electric Ind Co Ltd

Also Published As

Publication number Publication date
JPS5527868A (en) 1980-02-28

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