JPS5618537B2 - - Google Patents
Info
- Publication number
- JPS5618537B2 JPS5618537B2 JP10095378A JP10095378A JPS5618537B2 JP S5618537 B2 JPS5618537 B2 JP S5618537B2 JP 10095378 A JP10095378 A JP 10095378A JP 10095378 A JP10095378 A JP 10095378A JP S5618537 B2 JPS5618537 B2 JP S5618537B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10095378A JPS5527868A (en) | 1978-08-21 | 1978-08-21 | Production of zinc oxide thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10095378A JPS5527868A (en) | 1978-08-21 | 1978-08-21 | Production of zinc oxide thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5527868A JPS5527868A (en) | 1980-02-28 |
JPS5618537B2 true JPS5618537B2 (en) | 1981-04-30 |
Family
ID=14287711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10095378A Granted JPS5527868A (en) | 1978-08-21 | 1978-08-21 | Production of zinc oxide thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5527868A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0141909B2 (en) * | 1981-11-16 | 1989-09-08 | Matsushita Electric Ind Co Ltd |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4845416B2 (en) * | 2005-04-21 | 2011-12-28 | 双葉電子工業株式会社 | Vapor deposition equipment |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112488A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Method of producing a zinc oxide film |
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1978
- 1978-08-21 JP JP10095378A patent/JPS5527868A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112488A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Method of producing a zinc oxide film |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0141909B2 (en) * | 1981-11-16 | 1989-09-08 | Matsushita Electric Ind Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5527868A (en) | 1980-02-28 |