JPS5690269A - Measuring method for semiconductor integrated circuit - Google Patents

Measuring method for semiconductor integrated circuit

Info

Publication number
JPS5690269A
JPS5690269A JP16853679A JP16853679A JPS5690269A JP S5690269 A JPS5690269 A JP S5690269A JP 16853679 A JP16853679 A JP 16853679A JP 16853679 A JP16853679 A JP 16853679A JP S5690269 A JPS5690269 A JP S5690269A
Authority
JP
Japan
Prior art keywords
chip
test element
programs
wafer
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16853679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228567B2 (cs
Inventor
Hidekuni Ishida
Shigeo Furuguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16853679A priority Critical patent/JPS5690269A/ja
Publication of JPS5690269A publication Critical patent/JPS5690269A/ja
Publication of JPS6228567B2 publication Critical patent/JPS6228567B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP16853679A 1979-12-25 1979-12-25 Measuring method for semiconductor integrated circuit Granted JPS5690269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16853679A JPS5690269A (en) 1979-12-25 1979-12-25 Measuring method for semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16853679A JPS5690269A (en) 1979-12-25 1979-12-25 Measuring method for semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS5690269A true JPS5690269A (en) 1981-07-22
JPS6228567B2 JPS6228567B2 (cs) 1987-06-22

Family

ID=15869830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16853679A Granted JPS5690269A (en) 1979-12-25 1979-12-25 Measuring method for semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5690269A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139640A (ja) * 1983-01-31 1984-08-10 Ando Electric Co Ltd 集積回路測定装置
JPS60148136A (ja) * 1984-01-12 1985-08-05 Toshiba Corp 半導体試験装置
CN112201644A (zh) * 2019-07-08 2021-01-08 艾普凌科有限公司 半导体装置及其检查方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542060A (en) * 1977-06-07 1979-01-09 Toshiba Corp Semiconductor wafer
JPS5488084A (en) * 1977-12-26 1979-07-12 Fujitsu Ltd Test method of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542060A (en) * 1977-06-07 1979-01-09 Toshiba Corp Semiconductor wafer
JPS5488084A (en) * 1977-12-26 1979-07-12 Fujitsu Ltd Test method of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139640A (ja) * 1983-01-31 1984-08-10 Ando Electric Co Ltd 集積回路測定装置
JPS60148136A (ja) * 1984-01-12 1985-08-05 Toshiba Corp 半導体試験装置
CN112201644A (zh) * 2019-07-08 2021-01-08 艾普凌科有限公司 半导体装置及其检查方法
JP2021012970A (ja) * 2019-07-08 2021-02-04 エイブリック株式会社 半導体装置およびその検査方法

Also Published As

Publication number Publication date
JPS6228567B2 (cs) 1987-06-22

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