JPS5685879A - Gap green light emitting diode - Google Patents

Gap green light emitting diode

Info

Publication number
JPS5685879A
JPS5685879A JP16270179A JP16270179A JPS5685879A JP S5685879 A JPS5685879 A JP S5685879A JP 16270179 A JP16270179 A JP 16270179A JP 16270179 A JP16270179 A JP 16270179A JP S5685879 A JPS5685879 A JP S5685879A
Authority
JP
Japan
Prior art keywords
gas
gap
type gap
light emitting
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16270179A
Other languages
Japanese (ja)
Inventor
Kazumi Unno
Yasuo Idei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16270179A priority Critical patent/JPS5685879A/en
Publication of JPS5685879A publication Critical patent/JPS5685879A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26Materials of the light emitting region
    • H01L33/30Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE:To obtain a GaP green LED having high light emission efficiency by accumulating an N type GaP epitaxial grown layer having a thickness of approx. 15mum on an N type GaP monocrystalline substrate. CONSTITUTION:A boat 11 is filled in an epitaxial growth furnace, and the furnace is heated to 1,000 deg.C while feeding H2 gas thereto. Thereafter, a slider 12 is operated, and Ga solution 13 is adhered in a predetermined thickness on a semiconductor substrate 16. Subsequently, the furnace temperature is decreased to 950 deg.C, and an Si-doped N type GaP epitaxially grown layer 2 is formed on the substrate 16. Atmospheric gas is exchanged from the H2 to (Ar+NH3) gas after a predetermined time, is cooled to 900 deg.C, and N-doped P type GaP epitaxially grown layer 4 is accuuated in approx. 15mum. The atmospheric gas is then exchanged to Zn gas, is retained to 900 deg.C for a predetermined time, is then decreased to 800 deg.C, and the layer 4 is grown. Thus, a GaP green LED having perferable light emitting ef ficiency can be obtained.
JP16270179A 1979-12-17 1979-12-17 Gap green light emitting diode Pending JPS5685879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16270179A JPS5685879A (en) 1979-12-17 1979-12-17 Gap green light emitting diode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16270179A JPS5685879A (en) 1979-12-17 1979-12-17 Gap green light emitting diode

Publications (1)

Publication Number Publication Date
JPS5685879A true JPS5685879A (en) 1981-07-13

Family

ID=15759652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16270179A Pending JPS5685879A (en) 1979-12-17 1979-12-17 Gap green light emitting diode

Country Status (1)

Country Link
JP (1) JPS5685879A (en)

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