JPS52103399A - Production of gallium nitride - Google Patents
Production of gallium nitrideInfo
- Publication number
- JPS52103399A JPS52103399A JP2092576A JP2092576A JPS52103399A JP S52103399 A JPS52103399 A JP S52103399A JP 2092576 A JP2092576 A JP 2092576A JP 2092576 A JP2092576 A JP 2092576A JP S52103399 A JPS52103399 A JP S52103399A
- Authority
- JP
- Japan
- Prior art keywords
- production
- gallium nitride
- gan
- compounds
- silicon substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To form a high quality epitaxial growth layer of GaN on a silicon substrate by pyrolyzing organic Ga compounds and NH3.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2092576A JPS52103399A (en) | 1976-02-27 | 1976-02-27 | Production of gallium nitride |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2092576A JPS52103399A (en) | 1976-02-27 | 1976-02-27 | Production of gallium nitride |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52103399A true JPS52103399A (en) | 1977-08-30 |
Family
ID=12040786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2092576A Pending JPS52103399A (en) | 1976-02-27 | 1976-02-27 | Production of gallium nitride |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52103399A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7332031B2 (en) | 1994-01-27 | 2008-02-19 | Cree, Inc. | Bulk single crystal gallium nitride and method of making same |
-
1976
- 1976-02-27 JP JP2092576A patent/JPS52103399A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7332031B2 (en) | 1994-01-27 | 2008-02-19 | Cree, Inc. | Bulk single crystal gallium nitride and method of making same |
US7794542B2 (en) | 1994-01-27 | 2010-09-14 | Cree, Inc. | Bulk single crystal gallium nitride and method of making same |
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