JPS52103399A - Production of gallium nitride - Google Patents

Production of gallium nitride

Info

Publication number
JPS52103399A
JPS52103399A JP2092576A JP2092576A JPS52103399A JP S52103399 A JPS52103399 A JP S52103399A JP 2092576 A JP2092576 A JP 2092576A JP 2092576 A JP2092576 A JP 2092576A JP S52103399 A JPS52103399 A JP S52103399A
Authority
JP
Japan
Prior art keywords
production
gallium nitride
gan
compounds
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2092576A
Other languages
Japanese (ja)
Inventor
Katsuto Nagano
Shozo Sasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2092576A priority Critical patent/JPS52103399A/en
Publication of JPS52103399A publication Critical patent/JPS52103399A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To form a high quality epitaxial growth layer of GaN on a silicon substrate by pyrolyzing organic Ga compounds and NH3.
COPYRIGHT: (C)1977,JPO&Japio
JP2092576A 1976-02-27 1976-02-27 Production of gallium nitride Pending JPS52103399A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2092576A JPS52103399A (en) 1976-02-27 1976-02-27 Production of gallium nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2092576A JPS52103399A (en) 1976-02-27 1976-02-27 Production of gallium nitride

Publications (1)

Publication Number Publication Date
JPS52103399A true JPS52103399A (en) 1977-08-30

Family

ID=12040786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2092576A Pending JPS52103399A (en) 1976-02-27 1976-02-27 Production of gallium nitride

Country Status (1)

Country Link
JP (1) JPS52103399A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7332031B2 (en) 1994-01-27 2008-02-19 Cree, Inc. Bulk single crystal gallium nitride and method of making same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7332031B2 (en) 1994-01-27 2008-02-19 Cree, Inc. Bulk single crystal gallium nitride and method of making same
US7794542B2 (en) 1994-01-27 2010-09-14 Cree, Inc. Bulk single crystal gallium nitride and method of making same

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