JPS5671949A - Specimen carrier for charge particle injector - Google Patents
Specimen carrier for charge particle injectorInfo
- Publication number
- JPS5671949A JPS5671949A JP14865479A JP14865479A JPS5671949A JP S5671949 A JPS5671949 A JP S5671949A JP 14865479 A JP14865479 A JP 14865479A JP 14865479 A JP14865479 A JP 14865479A JP S5671949 A JPS5671949 A JP S5671949A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- plate
- code
- injection
- pockets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14865479A JPS5671949A (en) | 1979-11-15 | 1979-11-15 | Specimen carrier for charge particle injector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14865479A JPS5671949A (en) | 1979-11-15 | 1979-11-15 | Specimen carrier for charge particle injector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5671949A true JPS5671949A (en) | 1981-06-15 |
JPS6119100B2 JPS6119100B2 (ja) | 1986-05-15 |
Family
ID=15457629
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14865479A Granted JPS5671949A (en) | 1979-11-15 | 1979-11-15 | Specimen carrier for charge particle injector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5671949A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58138340U (ja) * | 1982-03-15 | 1983-09-17 | 黒谷 信子 | ウエハの洗浄・エツチング用キヤリア |
JPS58194351A (ja) * | 1982-02-19 | 1983-11-12 | プレシジョン・モノリシックス・インコ−ポレ−テッド | 集積回路デバイスを探知する装置並びに方法 |
JPS58202537A (ja) * | 1982-05-20 | 1983-11-25 | Mitsubishi Electric Corp | 半導体リ−ドフレ−ム収納用マガジンの識別方法 |
JPS58177938U (ja) * | 1982-05-22 | 1983-11-28 | 相合 征一郎 | 自動化ラインにおける搬送用ボツクス |
JPS5996836U (ja) * | 1982-12-20 | 1984-06-30 | 三菱電機株式会社 | 半導体ウエハカセツト |
JPS61239635A (ja) * | 1985-04-16 | 1986-10-24 | Kakizaki Seisakusho:Kk | ウエハ用バスケツト |
JPS62102255U (ja) * | 1985-12-17 | 1987-06-29 | ||
JPS63153517U (ja) * | 1987-03-28 | 1988-10-07 |
-
1979
- 1979-11-15 JP JP14865479A patent/JPS5671949A/ja active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58194351A (ja) * | 1982-02-19 | 1983-11-12 | プレシジョン・モノリシックス・インコ−ポレ−テッド | 集積回路デバイスを探知する装置並びに方法 |
JPH04389B2 (ja) * | 1982-02-19 | 1992-01-07 | Pureshijon Monorishitsukusu Inc | |
JPS58138340U (ja) * | 1982-03-15 | 1983-09-17 | 黒谷 信子 | ウエハの洗浄・エツチング用キヤリア |
JPS58202537A (ja) * | 1982-05-20 | 1983-11-25 | Mitsubishi Electric Corp | 半導体リ−ドフレ−ム収納用マガジンの識別方法 |
JPS58177938U (ja) * | 1982-05-22 | 1983-11-28 | 相合 征一郎 | 自動化ラインにおける搬送用ボツクス |
JPS5996836U (ja) * | 1982-12-20 | 1984-06-30 | 三菱電機株式会社 | 半導体ウエハカセツト |
JPS61239635A (ja) * | 1985-04-16 | 1986-10-24 | Kakizaki Seisakusho:Kk | ウエハ用バスケツト |
JPS62102255U (ja) * | 1985-12-17 | 1987-06-29 | ||
JPS63153517U (ja) * | 1987-03-28 | 1988-10-07 |
Also Published As
Publication number | Publication date |
---|---|
JPS6119100B2 (ja) | 1986-05-15 |
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