JPS63153517U - - Google Patents

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Publication number
JPS63153517U
JPS63153517U JP4604987U JP4604987U JPS63153517U JP S63153517 U JPS63153517 U JP S63153517U JP 4604987 U JP4604987 U JP 4604987U JP 4604987 U JP4604987 U JP 4604987U JP S63153517 U JPS63153517 U JP S63153517U
Authority
JP
Japan
Prior art keywords
cassette
side plates
wafer cassette
base
rear support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4604987U
Other languages
English (en)
Other versions
JPH0625014Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987046049U priority Critical patent/JPH0625014Y2/ja
Publication of JPS63153517U publication Critical patent/JPS63153517U/ja
Application granted granted Critical
Publication of JPH0625014Y2 publication Critical patent/JPH0625014Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図ないし第５図は本考案の一実施例を示す
もので、第１図は基部の正面図、第２図は同側面
図、第３図はウエーハカセツトの斜視図、第４図
と第５図はカセツト番号読み取り装置の一例を示
すもので、第４図は断面図、第５図は平面図であ
る。 １……ウエーハカセツト、１ａ……溝、１ｂ…
…側板、１ｃ……前支持板、１ｃ……後支持板、
１ｆ……基部、１ｈ……カセツト認識部、１ｉ…
…カセツト識別用穴。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエーハ収納用の溝を有する一対の側板と、こ
    れらの側板に設けられた前後の支持板とからなる
    ウエーハカセツトにおいて、上記側板の基部に、
    カセツト識別用穴を穿設するためのカセツト認識
    部を形成したことを特徴とするウエーハカセツト
    。
JP1987046049U 1987-03-28 1987-03-28 ウエ−ハカセツト Expired - Lifetime JPH0625014Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987046049U JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987046049U JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Publications (2)

Publication Number Publication Date
JPS63153517U true JPS63153517U (ja) 1988-10-07
JPH0625014Y2 JPH0625014Y2 (ja) 1994-06-29

Family

ID=30865350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987046049U Expired - Lifetime JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Country Status (1)

Country Link
JP (1) JPH0625014Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector
JPS6149447U (ja) * 1984-09-03 1986-04-03
JPS62163949U (ja) * 1986-04-09 1987-10-17

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector
JPS6149447U (ja) * 1984-09-03 1986-04-03
JPS62163949U (ja) * 1986-04-09 1987-10-17

Also Published As

Publication number Publication date
JPH0625014Y2 (ja) 1994-06-29

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