JPS6439641U - - Google Patents
Info
- Publication number
- JPS6439641U JPS6439641U JP13475087U JP13475087U JPS6439641U JP S6439641 U JPS6439641 U JP S6439641U JP 13475087 U JP13475087 U JP 13475087U JP 13475087 U JP13475087 U JP 13475087U JP S6439641 U JPS6439641 U JP S6439641U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- side plates
- support plates
- cassette
- gripping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図ないし第６図は本考案の一実施例を示す
もので、第１図は正面図、第２図は右側面図、第
３図は左側面図、第４図は平面図、第５図は斜視
図、第６図は把持装置の正面図である。 １……ウエーハカセツト、１ａ……溝、１ｂ…
…側板、１ｄ……前支持板、１ｅ……後支持板、
１ｆ……溝部、ｈ……基準高さ。
もので、第１図は正面図、第２図は右側面図、第
３図は左側面図、第４図は平面図、第５図は斜視
図、第６図は把持装置の正面図である。 １……ウエーハカセツト、１ａ……溝、１ｂ…
…側板、１ｄ……前支持板、１ｅ……後支持板、
１ｆ……溝部、ｈ……基準高さ。
Claims (1)
- ウエーハ収納用の溝を有する一対の側板と、こ
の側板に設けられた前後の支持板とからなるウエ
ーハカセツトにおいて、上記各支持板の外面の所
定高さに、カセツト把持用の係止部を形成したこ
とを特徴とするウエーハカセツト。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13475087U JPS6439641U (ja) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13475087U JPS6439641U (ja) | 1987-09-03 | 1987-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439641U true JPS6439641U (ja) | 1989-03-09 |
Family
ID=31393781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13475087U Pending JPS6439641U (ja) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439641U (ja) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55148417A (en) * | 1979-05-07 | 1980-11-19 | Nec Kyushu Ltd | Magazine case for accommodating semiconductor substrate |
| JPS5947739A (ja) * | 1982-09-10 | 1984-03-17 | Hitachi Ltd | ウエハ処理用治具 |
| JPS60187027A (ja) * | 1984-03-07 | 1985-09-24 | Marine Instr Co Ltd | 部品の洗浄方法 |
-
1987
- 1987-09-03 JP JP13475087U patent/JPS6439641U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55148417A (en) * | 1979-05-07 | 1980-11-19 | Nec Kyushu Ltd | Magazine case for accommodating semiconductor substrate |
| JPS5947739A (ja) * | 1982-09-10 | 1984-03-17 | Hitachi Ltd | ウエハ処理用治具 |
| JPS60187027A (ja) * | 1984-03-07 | 1985-09-24 | Marine Instr Co Ltd | 部品の洗浄方法 |