JPS55148417A - Magazine case for accommodating semiconductor substrate - Google Patents

Abstract

PURPOSE:To prevent the reduction of working efficiency of transportation of magazine case for accommodating semiconductor substrates and the deterioration of reliability of semiconductor devices by a method wherein a carrying handle is prepared at the upper part of a plane surface parallel with the substrates of magazine case for accommodating semiconductor substrates. CONSTITUTION:Members 2 to hold plural semiconductor substrates 1 at a constant distance and in parallel, carrying handle 3 at the upper part of a plane surface parallel with the semiconductor substrates 1 and a shielding plate 4 made in the same member with the handle 3 are equipped to a magazine case for accommodating semiconductor substrates. By gripping the handle 3 in the transfer process, the difficulty of transfer increased by the enlargement of case-size is eliminated, and the contamination of semiconductor substrates is prevented with the shielding plate 4 intercepting a man's hand 5 from the semiconductor substrates 1 completely. Moreover by the preparation of handle 5 at the upper part, an opening for taking in and out of semiconductor substrates is located always over the holizontal line, the discrimination of to find out location of opening for taking in and out at the time of grippng becomes unnecessary.