ES477151A1 - Un aparato para generar senales de salida para empleo en la alineacion con respecto a una referencia conocida de un ob- jeto. - Google Patents
Un aparato para generar senales de salida para empleo en la alineacion con respecto a una referencia conocida de un ob- jeto.Info
- Publication number
- ES477151A1 ES477151A1 ES477151A ES477151A ES477151A1 ES 477151 A1 ES477151 A1 ES 477151A1 ES 477151 A ES477151 A ES 477151A ES 477151 A ES477151 A ES 477151A ES 477151 A1 ES477151 A1 ES 477151A1
- Authority
- ES
- Spain
- Prior art keywords
- video signals
- digitized video
- objects
- basis
- complete
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
- G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30204—Marker
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/20—Image preprocessing
- G06V10/24—Aligning, centring, orientation detection or correction of the image
- G06V10/245—Aligning, centring, orientation detection or correction of the image by locating a pattern; Special marks for positioning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Image Input (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Un aparato para generar señales de salida para empleo en alineación con respecto a una posición de referencia conocida de un objeto dispuesto sobre un soporte ajustable en el campo de visión de una cámara de televisión explorando la cámara de televisión una superficie del objeto y una zona periférica que rodea al objeto en una trama de líneas y generando señales eléctricas de video que corresponden a una imagen de la zona explorada.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2803653A DE2803653C3 (de) | 1978-01-27 | 1978-01-27 | Ausrichtvorrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
ES477151A1 true ES477151A1 (es) | 1979-07-01 |
Family
ID=6030582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES477151A Expired ES477151A1 (es) | 1978-01-27 | 1979-01-25 | Un aparato para generar senales de salida para empleo en la alineacion con respecto a una referencia conocida de un ob- jeto. |
Country Status (9)
Country | Link |
---|---|
US (2) | US4352125A (es) |
JP (1) | JPS54148326A (es) |
CH (1) | CH611059A5 (es) |
DE (1) | DE2803653C3 (es) |
ES (1) | ES477151A1 (es) |
FR (1) | FR2434535B1 (es) |
GB (1) | GB2013365B (es) |
IT (1) | IT1114484B (es) |
PT (1) | PT69143A (es) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6016673B2 (ja) * | 1978-12-25 | 1985-04-26 | 川崎重工業株式会社 | サ−ボ系における被検体認識装置 |
DE2910580C3 (de) * | 1979-03-17 | 1982-01-21 | Texas Instruments Deutschland Gmbh, 8050 Freising | Ausrichtvorrichtung |
US4450579A (en) * | 1980-06-10 | 1984-05-22 | Fujitsu Limited | Recognition method and apparatus |
DD158824A1 (de) * | 1980-11-03 | 1983-02-02 | Adelbrecht Schorcht | Anordnung zur automatischen justierung mindestens eines gegenstandes |
JPS57152073A (en) * | 1981-03-16 | 1982-09-20 | Ando Electric Co Ltd | Original profiling reader |
US4414573A (en) * | 1981-04-08 | 1983-11-08 | Ampex Corporation | Pattern recognition circuit for reliably distinguishing between different portions of a diascope pattern during video camera setup |
US4479145A (en) * | 1981-07-29 | 1984-10-23 | Nippon Kogaku K.K. | Apparatus for detecting the defect of pattern |
US4500968A (en) * | 1982-06-29 | 1985-02-19 | Domtar Inc. | Paper machine wet line control |
US4550374A (en) * | 1982-11-15 | 1985-10-29 | Tre Semiconductor Equipment Corporation | High speed alignment method for wafer stepper |
GB2131162B (en) * | 1982-11-27 | 1986-04-30 | Ferranti Plc | Aligning objects |
JPS59157505A (ja) * | 1983-02-28 | 1984-09-06 | Hitachi Ltd | パタ−ン検査装置 |
JPS60122304A (ja) * | 1983-11-09 | 1985-06-29 | Shinetsu Eng Kk | 自動寸法測定装置 |
EP0147493B1 (fr) * | 1983-12-28 | 1988-09-07 | International Business Machines Corporation | Procédé et équipement pour l'alignement automatique d'un objet par rapport à une référence |
US4688088A (en) * | 1984-04-20 | 1987-08-18 | Canon Kabushiki Kaisha | Position detecting device and method |
FR2570913B1 (fr) * | 1984-09-24 | 1988-06-10 | Aerospatiale | Procede et dispositif d'aide au positionnement de pieces par superposition d'images |
JPH0616013B2 (ja) * | 1984-11-22 | 1994-03-02 | 肇産業株式会社 | 自動検査装置 |
JPH0666241B2 (ja) * | 1985-10-14 | 1994-08-24 | 株式会社日立製作所 | 位置検出方法 |
US4651203A (en) * | 1985-10-29 | 1987-03-17 | At&T Technologies, Inc. | Video controlled article positioning system |
US4949390A (en) * | 1987-04-16 | 1990-08-14 | Applied Vision Systems, Inc. | Interconnect verification using serial neighborhood processors |
US4896206A (en) * | 1987-12-14 | 1990-01-23 | Electro Science Industries, Inc. | Video detection system |
US4998005A (en) * | 1989-05-15 | 1991-03-05 | General Electric Company | Machine vision system |
US5113565A (en) | 1990-07-06 | 1992-05-19 | International Business Machines Corp. | Apparatus and method for inspection and alignment of semiconductor chips and conductive lead frames |
US5097602A (en) * | 1990-07-09 | 1992-03-24 | Westinghouse Electric Corp. | Apparatus and method for automated inspection of a surface contour on a workpiece |
JPH0724278B2 (ja) * | 1991-01-10 | 1995-03-15 | 信越半導体株式会社 | パターンシフト測定方法 |
US7843510B1 (en) | 1998-01-16 | 2010-11-30 | Ecole Polytechnique Federale De Lausanne | Method and system for combining video sequences with spatio-temporal alignment |
US6320624B1 (en) | 1998-01-16 | 2001-11-20 | ECOLE POLYTECHNIQUE FéDéRALE | Method and system for combining video sequences with spatio-temporal alignment |
CN100349188C (zh) * | 1999-11-24 | 2007-11-14 | 伊摩信科技有限公司 | 以时空同步整合视频序列的方法及系统 |
CH694931A5 (de) * | 2000-03-17 | 2005-09-15 | Esec Trading Sa | Einrichtung fuer die Montage von Halbleiterchips auf einem Substrat. |
US7392287B2 (en) | 2001-03-27 | 2008-06-24 | Hemisphere Ii Investment Lp | Method and apparatus for sharing information using a handheld device |
US7112812B2 (en) * | 2001-12-28 | 2006-09-26 | Applied Materials, Inc. | Optical measurement apparatus |
DE102006003228A1 (de) * | 2006-01-24 | 2007-08-02 | Sick Ag | Vorrichtung zur Überwachung eines Schutzfeldes |
JP6534316B2 (ja) * | 2015-08-25 | 2019-06-26 | 日機装株式会社 | 漏血検出装置およびそれを用いた漏血検出方法 |
KR102566136B1 (ko) | 2016-10-14 | 2023-08-10 | 삼성전자주식회사 | 계측 시스템 및 이를 사용하는 스테이지 제어 장치 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3515877A (en) * | 1965-12-13 | 1970-06-02 | John W Massing | Electro-optical positioner |
US3562423A (en) * | 1967-08-15 | 1971-02-09 | Univ Northwestern | Dictorial tracking and recognition system which provides display of target identified by brilliance and spatial characteristics |
CA968439A (en) * | 1971-05-26 | 1975-05-27 | Western Electric Company, Incorporated | Video controlled positioning method and apparatus |
US3899634A (en) * | 1971-05-26 | 1975-08-12 | Western Electric Co | Video controlled positioning method and apparatus |
GB1401179A (en) * | 1971-09-22 | 1975-07-16 | Image Analysing Computers Ltd | Automated image analysis employing automatic fucussing |
JPS5214112B2 (es) * | 1973-02-22 | 1977-04-19 | ||
US3814845A (en) * | 1973-03-01 | 1974-06-04 | Bell Telephone Labor Inc | Object positioning |
JPS5425782B2 (es) * | 1973-03-28 | 1979-08-30 | ||
US3870814A (en) * | 1973-09-11 | 1975-03-11 | Mosler Safe Co | Image positioning apparatus and method |
US3903363A (en) * | 1974-05-31 | 1975-09-02 | Western Electric Co | Automatic positioning system and method |
US3958740A (en) * | 1974-07-08 | 1976-05-25 | Dixon Automation, Inc. | Automatic component assembly machine and method relating thereto |
US3988535A (en) * | 1975-11-04 | 1976-10-26 | Western Electric Company, Inc. | Automated positioning |
US4041286A (en) * | 1975-11-20 | 1977-08-09 | The Bendix Corporation | Method and apparatus for detecting characteristic features of surfaces |
JPS52140278A (en) * | 1976-05-19 | 1977-11-22 | Hitachi Ltd | Position detector |
CH643959A5 (de) * | 1978-04-14 | 1984-06-29 | Siemens Ag | Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips. |
US4253111A (en) * | 1978-09-25 | 1981-02-24 | Gca Corporation | Apparatus for bonding leads to semiconductor chips |
-
1978
- 1978-01-27 DE DE2803653A patent/DE2803653C3/de not_active Expired
- 1978-06-22 CH CH684378A patent/CH611059A5/xx not_active IP Right Cessation
-
1979
- 1979-01-15 GB GB7901379A patent/GB2013365B/en not_active Expired
- 1979-01-24 FR FR7901746A patent/FR2434535B1/fr not_active Expired
- 1979-01-25 ES ES477151A patent/ES477151A1/es not_active Expired
- 1979-01-26 PT PT7969143A patent/PT69143A/pt unknown
- 1979-01-26 IT IT47798/79A patent/IT1114484B/it active
- 1979-01-26 JP JP731879A patent/JPS54148326A/ja active Granted
-
1980
- 1980-01-28 US US06/115,659 patent/US4352125A/en not_active Expired - Lifetime
- 1980-06-30 US US06/164,717 patent/US4364086A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
PT69143A (en) | 1979-02-01 |
DE2803653C3 (de) | 1986-05-28 |
CH611059A5 (es) | 1979-05-15 |
IT7947798A0 (it) | 1979-01-26 |
US4352125A (en) | 1982-09-28 |
DE2803653A1 (de) | 1979-08-02 |
DE2803653B2 (de) | 1980-06-04 |
GB2013365B (en) | 1982-08-18 |
GB2013365A (en) | 1979-08-08 |
JPS641832B2 (es) | 1989-01-12 |
US4364086A (en) | 1982-12-14 |
JPS54148326A (en) | 1979-11-20 |
FR2434535B1 (fr) | 1986-06-27 |
IT1114484B (it) | 1986-01-27 |
FR2434535A1 (fr) | 1980-03-21 |
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