JPS5667966A - Semiconductor device and preparation method thereof - Google Patents

Semiconductor device and preparation method thereof

Info

Publication number
JPS5667966A
JPS5667966A JP14417779A JP14417779A JPS5667966A JP S5667966 A JPS5667966 A JP S5667966A JP 14417779 A JP14417779 A JP 14417779A JP 14417779 A JP14417779 A JP 14417779A JP S5667966 A JPS5667966 A JP S5667966A
Authority
JP
Japan
Prior art keywords
layer
oxidation
type
oxide film
base part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14417779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS64826B2 (enrdf_load_stackoverflow
Inventor
Masaaki Ohira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14417779A priority Critical patent/JPS5667966A/ja
Publication of JPS5667966A publication Critical patent/JPS5667966A/ja
Publication of JPS64826B2 publication Critical patent/JPS64826B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Formation Of Insulating Films (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Bipolar Transistors (AREA)
JP14417779A 1979-11-07 1979-11-07 Semiconductor device and preparation method thereof Granted JPS5667966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14417779A JPS5667966A (en) 1979-11-07 1979-11-07 Semiconductor device and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14417779A JPS5667966A (en) 1979-11-07 1979-11-07 Semiconductor device and preparation method thereof

Publications (2)

Publication Number Publication Date
JPS5667966A true JPS5667966A (en) 1981-06-08
JPS64826B2 JPS64826B2 (enrdf_load_stackoverflow) 1989-01-09

Family

ID=15355987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14417779A Granted JPS5667966A (en) 1979-11-07 1979-11-07 Semiconductor device and preparation method thereof

Country Status (1)

Country Link
JP (1) JPS5667966A (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929986A (enrdf_load_stackoverflow) * 1972-07-19 1974-03-16
JPS4933555A (enrdf_load_stackoverflow) * 1972-07-26 1974-03-28
JPS5012990A (enrdf_load_stackoverflow) * 1973-06-05 1975-02-10
JPS5068065A (enrdf_load_stackoverflow) * 1973-10-17 1975-06-07

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929986A (enrdf_load_stackoverflow) * 1972-07-19 1974-03-16
JPS4933555A (enrdf_load_stackoverflow) * 1972-07-26 1974-03-28
JPS5012990A (enrdf_load_stackoverflow) * 1973-06-05 1975-02-10
JPS5068065A (enrdf_load_stackoverflow) * 1973-10-17 1975-06-07

Also Published As

Publication number Publication date
JPS64826B2 (enrdf_load_stackoverflow) 1989-01-09

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