JPS5068065A - - Google Patents

Info

Publication number
JPS5068065A
JPS5068065A JP48115760A JP11576073A JPS5068065A JP S5068065 A JPS5068065 A JP S5068065A JP 48115760 A JP48115760 A JP 48115760A JP 11576073 A JP11576073 A JP 11576073A JP S5068065 A JPS5068065 A JP S5068065A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48115760A
Other languages
Japanese (ja)
Other versions
JPS5636567B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11576073A priority Critical patent/JPS5636567B2/ja
Publication of JPS5068065A publication Critical patent/JPS5068065A/ja
Publication of JPS5636567B2 publication Critical patent/JPS5636567B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11576073A 1973-10-17 1973-10-17 Expired JPS5636567B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11576073A JPS5636567B2 (enrdf_load_stackoverflow) 1973-10-17 1973-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11576073A JPS5636567B2 (enrdf_load_stackoverflow) 1973-10-17 1973-10-17

Publications (2)

Publication Number Publication Date
JPS5068065A true JPS5068065A (enrdf_load_stackoverflow) 1975-06-07
JPS5636567B2 JPS5636567B2 (enrdf_load_stackoverflow) 1981-08-25

Family

ID=14670355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11576073A Expired JPS5636567B2 (enrdf_load_stackoverflow) 1973-10-17 1973-10-17

Country Status (1)

Country Link
JP (1) JPS5636567B2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539672A (en) * 1978-09-14 1980-03-19 Fujitsu Ltd Manufacturing semiconductor device
JPS5615080A (en) * 1979-07-18 1981-02-13 Fujitsu Ltd Mos type field effect transistor
JPS5667966A (en) * 1979-11-07 1981-06-08 Nec Corp Semiconductor device and preparation method thereof
JPS56101757A (en) * 1980-01-18 1981-08-14 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH04367235A (ja) * 1991-06-14 1992-12-18 Sharp Corp 半導体装置の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539672A (en) * 1978-09-14 1980-03-19 Fujitsu Ltd Manufacturing semiconductor device
JPS5615080A (en) * 1979-07-18 1981-02-13 Fujitsu Ltd Mos type field effect transistor
JPS5667966A (en) * 1979-11-07 1981-06-08 Nec Corp Semiconductor device and preparation method thereof
JPS56101757A (en) * 1980-01-18 1981-08-14 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH04367235A (ja) * 1991-06-14 1992-12-18 Sharp Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5636567B2 (enrdf_load_stackoverflow) 1981-08-25

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