JPS4929986A - - Google Patents

Info

Publication number
JPS4929986A
JPS4929986A JP47072761A JP7276172A JPS4929986A JP S4929986 A JPS4929986 A JP S4929986A JP 47072761 A JP47072761 A JP 47072761A JP 7276172 A JP7276172 A JP 7276172A JP S4929986 A JPS4929986 A JP S4929986A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47072761A
Other languages
Japanese (ja)
Other versions
JPS5548455B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7276172A priority Critical patent/JPS5548455B2/ja
Publication of JPS4929986A publication Critical patent/JPS4929986A/ja
Publication of JPS5548455B2 publication Critical patent/JPS5548455B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Element Separation (AREA)
JP7276172A 1972-07-19 1972-07-19 Expired JPS5548455B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7276172A JPS5548455B2 (enrdf_load_stackoverflow) 1972-07-19 1972-07-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7276172A JPS5548455B2 (enrdf_load_stackoverflow) 1972-07-19 1972-07-19

Publications (2)

Publication Number Publication Date
JPS4929986A true JPS4929986A (enrdf_load_stackoverflow) 1974-03-16
JPS5548455B2 JPS5548455B2 (enrdf_load_stackoverflow) 1980-12-05

Family

ID=13498655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7276172A Expired JPS5548455B2 (enrdf_load_stackoverflow) 1972-07-19 1972-07-19

Country Status (1)

Country Link
JP (1) JPS5548455B2 (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637642A (en) * 1979-09-04 1981-04-11 Nec Corp Semiconductor device
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
JPS5667966A (en) * 1979-11-07 1981-06-08 Nec Corp Semiconductor device and preparation method thereof
JPS56101757A (en) * 1980-01-18 1981-08-14 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS574124A (en) * 1980-06-10 1982-01-09 Fujitsu Ltd Manufacture of germanium semiconductor device
JPS57106111U (enrdf_load_stackoverflow) * 1980-12-20 1982-06-30
JPS57106131A (en) * 1980-12-24 1982-07-01 Fujitsu Ltd Manufacture of semiconductor device
JPS6431413A (en) * 1987-07-28 1989-02-01 Matsushita Electronics Corp Measurement of pattern shift during epitaxial growth
JP2001307999A (ja) * 2000-04-27 2001-11-02 Oki Electric Ind Co Ltd アライメントマークの構造およびその製造方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637642A (en) * 1979-09-04 1981-04-11 Nec Corp Semiconductor device
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
JPS5667966A (en) * 1979-11-07 1981-06-08 Nec Corp Semiconductor device and preparation method thereof
JPS56101757A (en) * 1980-01-18 1981-08-14 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS574124A (en) * 1980-06-10 1982-01-09 Fujitsu Ltd Manufacture of germanium semiconductor device
JPS57106111U (enrdf_load_stackoverflow) * 1980-12-20 1982-06-30
JPS57106131A (en) * 1980-12-24 1982-07-01 Fujitsu Ltd Manufacture of semiconductor device
JPS6431413A (en) * 1987-07-28 1989-02-01 Matsushita Electronics Corp Measurement of pattern shift during epitaxial growth
JP2001307999A (ja) * 2000-04-27 2001-11-02 Oki Electric Ind Co Ltd アライメントマークの構造およびその製造方法

Also Published As

Publication number Publication date
JPS5548455B2 (enrdf_load_stackoverflow) 1980-12-05

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