JPS5660055A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5660055A JPS5660055A JP13544379A JP13544379A JPS5660055A JP S5660055 A JPS5660055 A JP S5660055A JP 13544379 A JP13544379 A JP 13544379A JP 13544379 A JP13544379 A JP 13544379A JP S5660055 A JPS5660055 A JP S5660055A
- Authority
- JP
- Japan
- Prior art keywords
- region
- diffused
- guard ring
- window
- impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000012535 impurity Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 230000007935 neutral effect Effects 0.000 abstract 2
- 230000003647 oxidation Effects 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13544379A JPS5660055A (en) | 1979-10-20 | 1979-10-20 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13544379A JPS5660055A (en) | 1979-10-20 | 1979-10-20 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5660055A true JPS5660055A (en) | 1981-05-23 |
Family
ID=15151832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13544379A Pending JPS5660055A (en) | 1979-10-20 | 1979-10-20 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5660055A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58114456A (ja) * | 1981-12-26 | 1983-07-07 | Fuji Electric Co Ltd | 定電圧ダイオ−ド内蔵トランジスタ |
JPS6113664A (ja) * | 1984-06-22 | 1986-01-21 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | 大きな降伏電圧を有する半導体装置 |
JPS61251083A (ja) * | 1985-04-26 | 1986-11-08 | Rohm Co Ltd | 半導体装置 |
US4691224A (en) * | 1982-10-25 | 1987-09-01 | Mitsubishi Denki Kabushiki Kaisha | Planar semiconductor device with dual conductivity insulating layers over guard rings |
JP2006156936A (ja) * | 2004-10-25 | 2006-06-15 | Matsushita Electric Ind Co Ltd | 定電圧ダイオードおよびその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5271974A (en) * | 1975-12-11 | 1977-06-15 | Nec Corp | Production of semiconductor device |
JPS52129275A (en) * | 1976-04-21 | 1977-10-29 | Fujitsu Ltd | Impurity diffusion method |
-
1979
- 1979-10-20 JP JP13544379A patent/JPS5660055A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5271974A (en) * | 1975-12-11 | 1977-06-15 | Nec Corp | Production of semiconductor device |
JPS52129275A (en) * | 1976-04-21 | 1977-10-29 | Fujitsu Ltd | Impurity diffusion method |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58114456A (ja) * | 1981-12-26 | 1983-07-07 | Fuji Electric Co Ltd | 定電圧ダイオ−ド内蔵トランジスタ |
US4691224A (en) * | 1982-10-25 | 1987-09-01 | Mitsubishi Denki Kabushiki Kaisha | Planar semiconductor device with dual conductivity insulating layers over guard rings |
JPS6113664A (ja) * | 1984-06-22 | 1986-01-21 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | 大きな降伏電圧を有する半導体装置 |
JPS61251083A (ja) * | 1985-04-26 | 1986-11-08 | Rohm Co Ltd | 半導体装置 |
JP2006156936A (ja) * | 2004-10-25 | 2006-06-15 | Matsushita Electric Ind Co Ltd | 定電圧ダイオードおよびその製造方法 |
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