JPS5659804A - Apparatus for forming organic film - Google Patents
Apparatus for forming organic filmInfo
- Publication number
- JPS5659804A JPS5659804A JP13565579A JP13565579A JPS5659804A JP S5659804 A JPS5659804 A JP S5659804A JP 13565579 A JP13565579 A JP 13565579A JP 13565579 A JP13565579 A JP 13565579A JP S5659804 A JPS5659804 A JP S5659804A
- Authority
- JP
- Japan
- Prior art keywords
- inlet
- tube
- organic compound
- generating tube
- compound vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Polymerisation Methods In General (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: To prevent the diffusion of an organic compound vapor into the plasma zone, by protruding one end of a discharge plasma-generating tube having a carrier inlet into a reaction vessel having a diameter greater than that of the generating gas tube and having an inlet and exit for the organic compound vapor.
CONSTITUTION: The apparatus for forming organic films consists of a cischarge plasma-generating tube 8 having a carrier gas inlet 7, and a reaction vessel 11 in which a substrate to be treated is placed, which has an inlet 9 and exit 10 for an organic compound vapor, which is connected coaxially to one end of the generating tube 1 and which has a diameter greater than that of the generating tube 8. Because an end 12 of the generating tube 8 is protruded into the reaction vessel 11, a loss of discharging power, due to the deposition of polymer on the inner wall of the tube 8 (this polymer results from the diffusion of a portion of an organic compound vapor introduced from the inlet 9 into a discharge plasma zone) can be eliminated.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13565579A JPS5659804A (en) | 1979-10-19 | 1979-10-19 | Apparatus for forming organic film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13565579A JPS5659804A (en) | 1979-10-19 | 1979-10-19 | Apparatus for forming organic film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5659804A true JPS5659804A (en) | 1981-05-23 |
Family
ID=15156853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13565579A Pending JPS5659804A (en) | 1979-10-19 | 1979-10-19 | Apparatus for forming organic film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5659804A (en) |
-
1979
- 1979-10-19 JP JP13565579A patent/JPS5659804A/en active Pending
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