JPS5659804A - Apparatus for forming organic film - Google Patents

Apparatus for forming organic film

Info

Publication number
JPS5659804A
JPS5659804A JP13565579A JP13565579A JPS5659804A JP S5659804 A JPS5659804 A JP S5659804A JP 13565579 A JP13565579 A JP 13565579A JP 13565579 A JP13565579 A JP 13565579A JP S5659804 A JPS5659804 A JP S5659804A
Authority
JP
Japan
Prior art keywords
inlet
tube
organic compound
generating tube
compound vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13565579A
Other languages
Japanese (ja)
Inventor
Yoshimi Akai
Hideo Sanbe
Masahiko Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13565579A priority Critical patent/JPS5659804A/en
Publication of JPS5659804A publication Critical patent/JPS5659804A/en
Pending legal-status Critical Current

Links

Landscapes

  • Polymerisation Methods In General (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To prevent the diffusion of an organic compound vapor into the plasma zone, by protruding one end of a discharge plasma-generating tube having a carrier inlet into a reaction vessel having a diameter greater than that of the generating gas tube and having an inlet and exit for the organic compound vapor.
CONSTITUTION: The apparatus for forming organic films consists of a cischarge plasma-generating tube 8 having a carrier gas inlet 7, and a reaction vessel 11 in which a substrate to be treated is placed, which has an inlet 9 and exit 10 for an organic compound vapor, which is connected coaxially to one end of the generating tube 1 and which has a diameter greater than that of the generating tube 8. Because an end 12 of the generating tube 8 is protruded into the reaction vessel 11, a loss of discharging power, due to the deposition of polymer on the inner wall of the tube 8 (this polymer results from the diffusion of a portion of an organic compound vapor introduced from the inlet 9 into a discharge plasma zone) can be eliminated.
COPYRIGHT: (C)1981,JPO&Japio
JP13565579A 1979-10-19 1979-10-19 Apparatus for forming organic film Pending JPS5659804A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13565579A JPS5659804A (en) 1979-10-19 1979-10-19 Apparatus for forming organic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13565579A JPS5659804A (en) 1979-10-19 1979-10-19 Apparatus for forming organic film

Publications (1)

Publication Number Publication Date
JPS5659804A true JPS5659804A (en) 1981-05-23

Family

ID=15156853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13565579A Pending JPS5659804A (en) 1979-10-19 1979-10-19 Apparatus for forming organic film

Country Status (1)

Country Link
JP (1) JPS5659804A (en)

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