JPS5667554A - Forming device of organic matter film - Google Patents

Forming device of organic matter film

Info

Publication number
JPS5667554A
JPS5667554A JP14280279A JP14280279A JPS5667554A JP S5667554 A JPS5667554 A JP S5667554A JP 14280279 A JP14280279 A JP 14280279A JP 14280279 A JP14280279 A JP 14280279A JP S5667554 A JPS5667554 A JP S5667554A
Authority
JP
Japan
Prior art keywords
plasma
organic matter
tube
polymerization
discharge plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14280279A
Other languages
Japanese (ja)
Inventor
Yoshimi Akai
Hideo Sanbe
Masahiko Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14280279A priority Critical patent/JPS5667554A/en
Publication of JPS5667554A publication Critical patent/JPS5667554A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To increase the polymerization speed and make it possible to form a film selectively on a minute part, by converging and transferring plasma in the form of a beam from the discharge plasma region to the polymerization reaction region, in the organic matter film forming device using the plasma polymerization method.
CONSTITUTION: One end part 8 of discharge plasma tube 7 is protruded into tube 9 forming the reaction vessel and is formed into Lavel nozzle which has constricted part 10 and part 12 widened toward aperture end 11. The inside diameter of constricted part 10 is set to the 1/5W1/10 of the inside diameter of discharge plasma tube 7, and plasma generated in discharge plasma tube 7 is converged and transferred in the form of a beam into reaction vessel 9. As a result, since plasma is converged to a high density in the polymerization reaction region, the polymerization speed is increased and an organic matter film can be formed selectively on a minute part.
COPYRIGHT: (C)1981,JPO&Japio
JP14280279A 1979-11-06 1979-11-06 Forming device of organic matter film Pending JPS5667554A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14280279A JPS5667554A (en) 1979-11-06 1979-11-06 Forming device of organic matter film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14280279A JPS5667554A (en) 1979-11-06 1979-11-06 Forming device of organic matter film

Publications (1)

Publication Number Publication Date
JPS5667554A true JPS5667554A (en) 1981-06-06

Family

ID=15323966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14280279A Pending JPS5667554A (en) 1979-11-06 1979-11-06 Forming device of organic matter film

Country Status (1)

Country Link
JP (1) JPS5667554A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1734360A1 (en) * 2004-03-25 2006-12-20 Japan Advanced Institute of Science and Technology Plasma generating equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1734360A1 (en) * 2004-03-25 2006-12-20 Japan Advanced Institute of Science and Technology Plasma generating equipment
EP1734360A4 (en) * 2004-03-25 2011-05-11 Japan Adv Inst Science & Tech Plasma generating equipment

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