JPS5282184A - Vapor phase etching device - Google Patents
Vapor phase etching deviceInfo
- Publication number
- JPS5282184A JPS5282184A JP15781575A JP15781575A JPS5282184A JP S5282184 A JPS5282184 A JP S5282184A JP 15781575 A JP15781575 A JP 15781575A JP 15781575 A JP15781575 A JP 15781575A JP S5282184 A JPS5282184 A JP S5282184A
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- etching device
- phase etching
- tubular bodies
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent damaging of the material to be plasma-treated by charge particles by inserting metallic tubular bodies into a plasma generating tube and applying a voltage to these tubular bodies.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15781575A JPS5282184A (en) | 1975-12-29 | 1975-12-29 | Vapor phase etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15781575A JPS5282184A (en) | 1975-12-29 | 1975-12-29 | Vapor phase etching device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5282184A true JPS5282184A (en) | 1977-07-09 |
Family
ID=15657889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15781575A Pending JPS5282184A (en) | 1975-12-29 | 1975-12-29 | Vapor phase etching device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5282184A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62171748A (en) * | 1986-01-24 | 1987-07-28 | Hitachi Koki Co Ltd | Plasma treatment device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5144566A (en) * | 1974-08-02 | 1976-04-16 | Lfe Corp |
-
1975
- 1975-12-29 JP JP15781575A patent/JPS5282184A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5144566A (en) * | 1974-08-02 | 1976-04-16 | Lfe Corp |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62171748A (en) * | 1986-01-24 | 1987-07-28 | Hitachi Koki Co Ltd | Plasma treatment device |
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