JPS5282184A - Vapor phase etching device - Google Patents

Vapor phase etching device

Info

Publication number
JPS5282184A
JPS5282184A JP15781575A JP15781575A JPS5282184A JP S5282184 A JPS5282184 A JP S5282184A JP 15781575 A JP15781575 A JP 15781575A JP 15781575 A JP15781575 A JP 15781575A JP S5282184 A JPS5282184 A JP S5282184A
Authority
JP
Japan
Prior art keywords
vapor phase
etching device
phase etching
tubular bodies
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15781575A
Other languages
Japanese (ja)
Inventor
Haruhiko Abe
Akira Nishimoto
Kuniaki Miyake
Yumiko Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15781575A priority Critical patent/JPS5282184A/en
Publication of JPS5282184A publication Critical patent/JPS5282184A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent damaging of the material to be plasma-treated by charge particles by inserting metallic tubular bodies into a plasma generating tube and applying a voltage to these tubular bodies.
COPYRIGHT: (C)1977,JPO&Japio
JP15781575A 1975-12-29 1975-12-29 Vapor phase etching device Pending JPS5282184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15781575A JPS5282184A (en) 1975-12-29 1975-12-29 Vapor phase etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15781575A JPS5282184A (en) 1975-12-29 1975-12-29 Vapor phase etching device

Publications (1)

Publication Number Publication Date
JPS5282184A true JPS5282184A (en) 1977-07-09

Family

ID=15657889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15781575A Pending JPS5282184A (en) 1975-12-29 1975-12-29 Vapor phase etching device

Country Status (1)

Country Link
JP (1) JPS5282184A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171748A (en) * 1986-01-24 1987-07-28 Hitachi Koki Co Ltd Plasma treatment device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144566A (en) * 1974-08-02 1976-04-16 Lfe Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144566A (en) * 1974-08-02 1976-04-16 Lfe Corp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171748A (en) * 1986-01-24 1987-07-28 Hitachi Koki Co Ltd Plasma treatment device

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