JPS5586169A - Manufacture of organic photo-conducting film - Google Patents

Manufacture of organic photo-conducting film

Info

Publication number
JPS5586169A
JPS5586169A JP15853278A JP15853278A JPS5586169A JP S5586169 A JPS5586169 A JP S5586169A JP 15853278 A JP15853278 A JP 15853278A JP 15853278 A JP15853278 A JP 15853278A JP S5586169 A JPS5586169 A JP S5586169A
Authority
JP
Japan
Prior art keywords
container
plasma
region
substrates
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15853278A
Other languages
Japanese (ja)
Inventor
Yoshimi Akai
Masahiko Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15853278A priority Critical patent/JPS5586169A/en
Publication of JPS5586169A publication Critical patent/JPS5586169A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

Abstract

PURPOSE: To obtain a very thin film having sensitivity for near infrared wavelength region by using as material organic vapor having unsaturated bonds and by operating plasma polymerization when an organic film is formed on a substrate.
CONSTITUTION: A plurality of substrates 22 are enclosed in plasma polymerization reaction container 7, and a pressure of 2∼3 torr is provided inside container 7 via trap 20 by using oil pump 14. Next, a carrier gas, such as Ar, N2, etc. which is to be made into a plasma, is sent from tank 5b, via flowmeter 6b and needle valve 15b, to plasma generating region 12 connected to container 7. At the same time, an organic compound, such as vinylidene fluoride, ethylene, etc., having unsaturated bonds, is sent from tank 5a to container 7 via flow meter 6a and needle valve 15a. Next, a microwave is produced by magnetron 9 in square waveguide 9 surrounding region 12, and a plasma produced in region 12 is brought into container 7; and the compound film coating is fitted on substrates 22.
COPYRIGHT: (C)1980,JPO&Japio
JP15853278A 1978-12-25 1978-12-25 Manufacture of organic photo-conducting film Pending JPS5586169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15853278A JPS5586169A (en) 1978-12-25 1978-12-25 Manufacture of organic photo-conducting film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15853278A JPS5586169A (en) 1978-12-25 1978-12-25 Manufacture of organic photo-conducting film

Publications (1)

Publication Number Publication Date
JPS5586169A true JPS5586169A (en) 1980-06-28

Family

ID=15673778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15853278A Pending JPS5586169A (en) 1978-12-25 1978-12-25 Manufacture of organic photo-conducting film

Country Status (1)

Country Link
JP (1) JPS5586169A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4738912A (en) * 1985-09-13 1988-04-19 Minolta Camera Kabushiki Kaisha Photosensitive member having an amorphous carbon transport layer
US4741982A (en) * 1985-09-13 1988-05-03 Minolta Camera Kabushiki Kaisha Photosensitive member having undercoat layer of amorphous carbon
US4743522A (en) * 1985-09-13 1988-05-10 Minolta Camera Kabushiki Kaisha Photosensitive member with hydrogen-containing carbon layer
US4749636A (en) * 1985-09-13 1988-06-07 Minolta Camera Kabushiki Kaisha Photosensitive member with hydrogen-containing carbon layer
US4797338A (en) * 1986-09-16 1989-01-10 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer
US4801515A (en) * 1986-07-08 1989-01-31 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer
US4810606A (en) * 1986-07-07 1989-03-07 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer
US4851313A (en) * 1986-06-10 1989-07-25 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer and process for preparing same
US4863820A (en) * 1985-07-01 1989-09-05 Minolta Camera Kabushiki Kaisha Photosensitive member having amorphous silicon-germanium layer and process for producing same
US4863821A (en) * 1986-07-07 1989-09-05 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer having amorphous carbon
US4882256A (en) * 1986-10-14 1989-11-21 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer comprising amorphous carbon
US4886724A (en) * 1987-03-09 1989-12-12 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer and process for manufacturing the same
US4891291A (en) * 1987-03-09 1990-01-02 Minolta Camera Kabushiki Kaisha Photosensitive member having an amorphous carbon overcoat layer
US4994337A (en) * 1987-06-17 1991-02-19 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer
US5000831A (en) * 1987-03-09 1991-03-19 Minolta Camera Kabushiki Kaisha Method of production of amorphous hydrogenated carbon layer
US5166018A (en) * 1985-09-13 1992-11-24 Minolta Camera Kabushiki Kaisha Photosensitive member with hydrogen-containing carbon layer

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863820A (en) * 1985-07-01 1989-09-05 Minolta Camera Kabushiki Kaisha Photosensitive member having amorphous silicon-germanium layer and process for producing same
US5166018A (en) * 1985-09-13 1992-11-24 Minolta Camera Kabushiki Kaisha Photosensitive member with hydrogen-containing carbon layer
US4741982A (en) * 1985-09-13 1988-05-03 Minolta Camera Kabushiki Kaisha Photosensitive member having undercoat layer of amorphous carbon
US4743522A (en) * 1985-09-13 1988-05-10 Minolta Camera Kabushiki Kaisha Photosensitive member with hydrogen-containing carbon layer
US4749636A (en) * 1985-09-13 1988-06-07 Minolta Camera Kabushiki Kaisha Photosensitive member with hydrogen-containing carbon layer
US4738912A (en) * 1985-09-13 1988-04-19 Minolta Camera Kabushiki Kaisha Photosensitive member having an amorphous carbon transport layer
US4851313A (en) * 1986-06-10 1989-07-25 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer and process for preparing same
US4810606A (en) * 1986-07-07 1989-03-07 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer
US4863821A (en) * 1986-07-07 1989-09-05 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer having amorphous carbon
US4801515A (en) * 1986-07-08 1989-01-31 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer
US4797338A (en) * 1986-09-16 1989-01-10 Minolta Camera Kabushiki Kaisha Photosensitive member comprising charge generating layer and charge transporting layer
US4882256A (en) * 1986-10-14 1989-11-21 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer comprising amorphous carbon
US4886724A (en) * 1987-03-09 1989-12-12 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer and process for manufacturing the same
US4891291A (en) * 1987-03-09 1990-01-02 Minolta Camera Kabushiki Kaisha Photosensitive member having an amorphous carbon overcoat layer
US5000831A (en) * 1987-03-09 1991-03-19 Minolta Camera Kabushiki Kaisha Method of production of amorphous hydrogenated carbon layer
US4994337A (en) * 1987-06-17 1991-02-19 Minolta Camera Kabushiki Kaisha Photosensitive member having an overcoat layer

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