JPS5642354A - Manufacture of wired electrode - Google Patents
Manufacture of wired electrodeInfo
- Publication number
- JPS5642354A JPS5642354A JP11727679A JP11727679A JPS5642354A JP S5642354 A JPS5642354 A JP S5642354A JP 11727679 A JP11727679 A JP 11727679A JP 11727679 A JP11727679 A JP 11727679A JP S5642354 A JPS5642354 A JP S5642354A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- forming
- mask
- film
- lifting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11727679A JPS6034815B2 (ja) | 1979-09-14 | 1979-09-14 | 配線電極の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11727679A JPS6034815B2 (ja) | 1979-09-14 | 1979-09-14 | 配線電極の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5642354A true JPS5642354A (en) | 1981-04-20 |
JPS6034815B2 JPS6034815B2 (ja) | 1985-08-10 |
Family
ID=14707741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11727679A Expired JPS6034815B2 (ja) | 1979-09-14 | 1979-09-14 | 配線電極の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6034815B2 (ja) |
-
1979
- 1979-09-14 JP JP11727679A patent/JPS6034815B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6034815B2 (ja) | 1985-08-10 |
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