JPS5672512A - Formation of tiny electrode - Google Patents

Formation of tiny electrode

Info

Publication number
JPS5672512A
JPS5672512A JP14981979A JP14981979A JPS5672512A JP S5672512 A JPS5672512 A JP S5672512A JP 14981979 A JP14981979 A JP 14981979A JP 14981979 A JP14981979 A JP 14981979A JP S5672512 A JPS5672512 A JP S5672512A
Authority
JP
Japan
Prior art keywords
layer
electrode
treatment
mask
tiny
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14981979A
Other languages
Japanese (ja)
Inventor
Shuji Urabe
Ryuji Habuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14981979A priority Critical patent/JPS5672512A/en
Publication of JPS5672512A publication Critical patent/JPS5672512A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Weting (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To easily form a tiny transposition electrode, by removing the area which is not masked, from on the plate, by means of the etching treatment by which a metallic layer for the electrode to the chromium layer is made a mask. CONSTITUTION:A chromium layer 11 is attached by vapor deposition on the elastic substrate 1. A photoresist material layer 2 is formed on the layer 11 by means of application, and the selective exposure treatment to the layer 2 and the subsequent developing treatment are performed. A mask layer 3 corresponding to the pattern of a tiny electrode is formed on the layer 11, and a metallic layer 4 for the electrode is attached by means of the vapor deposition treatment by which the layer 3 to the layer 11 is made a mask. The mask layer 3 is removed from the layer 11 by performing the dissolving treatment to the layer 3. A chromium layer 12 under the metallic layer 4 for the electrode is formed by the layer 11 by removing the area which is not masked by the layer 4, from on the elastic substrate 1.
JP14981979A 1979-11-19 1979-11-19 Formation of tiny electrode Pending JPS5672512A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14981979A JPS5672512A (en) 1979-11-19 1979-11-19 Formation of tiny electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14981979A JPS5672512A (en) 1979-11-19 1979-11-19 Formation of tiny electrode

Publications (1)

Publication Number Publication Date
JPS5672512A true JPS5672512A (en) 1981-06-16

Family

ID=15483387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14981979A Pending JPS5672512A (en) 1979-11-19 1979-11-19 Formation of tiny electrode

Country Status (1)

Country Link
JP (1) JPS5672512A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653768A (en) * 1980-11-17 1994-02-25 British Technol Group Ltd Manufacture of sound-wave device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653768A (en) * 1980-11-17 1994-02-25 British Technol Group Ltd Manufacture of sound-wave device

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