JPS5756929A - Contact printing method - Google Patents

Contact printing method

Info

Publication number
JPS5756929A
JPS5756929A JP13250280A JP13250280A JPS5756929A JP S5756929 A JPS5756929 A JP S5756929A JP 13250280 A JP13250280 A JP 13250280A JP 13250280 A JP13250280 A JP 13250280A JP S5756929 A JPS5756929 A JP S5756929A
Authority
JP
Japan
Prior art keywords
resist
plate
dipped
contact printing
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13250280A
Other languages
Japanese (ja)
Inventor
Kazuhiro Tanaka
Isao Yamaha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13250280A priority Critical patent/JPS5756929A/en
Publication of JPS5756929A publication Critical patent/JPS5756929A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To facilitate the separation after a contact printing by lowering the surface free energy of a substrate coated with photosensitive resin and contact printing it. CONSTITUTION:An emulsion mask is covered on a side to be cntact printed, and Cr is covered on a glass substrate at the side to be printed as a plate coated with photoresist. The plate to be covered with the resist is dipped in developer for approx. 30sec is then washed with pure water, and is then dried with N2. Even if the treated plate is contact printed, the separation after the printing can be facilitated so that the resist do not separated. When it is developed after the exposure, a resist pattern of high accuracy can be obtained in the same manner as the conventional one. When it thus dipped in the developer before the exposure, uneven surface is produced in molecular level to substantially lower the surface free energy. Since uniform and low surface energy level is formed on the entire surface of the plate, another mutual action is not induced newly in contact printing. In order to lower the surface free energy, it may additionally be dipped in specific solution or may also be injected with ions to the resist.
JP13250280A 1980-09-23 1980-09-23 Contact printing method Pending JPS5756929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13250280A JPS5756929A (en) 1980-09-23 1980-09-23 Contact printing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13250280A JPS5756929A (en) 1980-09-23 1980-09-23 Contact printing method

Publications (1)

Publication Number Publication Date
JPS5756929A true JPS5756929A (en) 1982-04-05

Family

ID=15082856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13250280A Pending JPS5756929A (en) 1980-09-23 1980-09-23 Contact printing method

Country Status (1)

Country Link
JP (1) JPS5756929A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6300042B1 (en) 1998-11-24 2001-10-09 Motorola, Inc. Lithographic printing method using a low surface energy layer
EP1253058A2 (en) 2001-04-25 2002-10-30 Hitachi, Ltd. Railway car

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6300042B1 (en) 1998-11-24 2001-10-09 Motorola, Inc. Lithographic printing method using a low surface energy layer
US6562553B2 (en) 1998-11-24 2003-05-13 Motorola, Inc. Lithographic printing method using a low surface energy layer
EP1253058A2 (en) 2001-04-25 2002-10-30 Hitachi, Ltd. Railway car

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