JPS5640243A - Mask alignment - Google Patents

Mask alignment

Info

Publication number
JPS5640243A
JPS5640243A JP11710879A JP11710879A JPS5640243A JP S5640243 A JPS5640243 A JP S5640243A JP 11710879 A JP11710879 A JP 11710879A JP 11710879 A JP11710879 A JP 11710879A JP S5640243 A JPS5640243 A JP S5640243A
Authority
JP
Japan
Prior art keywords
mask
stamps
letters
pattern
register
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11710879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327847B2 (enrdf_load_stackoverflow
Inventor
Mototsugu Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11710879A priority Critical patent/JPS5640243A/ja
Publication of JPS5640243A publication Critical patent/JPS5640243A/ja
Publication of JPS6327847B2 publication Critical patent/JPS6327847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11710879A 1979-09-11 1979-09-11 Mask alignment Granted JPS5640243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11710879A JPS5640243A (en) 1979-09-11 1979-09-11 Mask alignment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11710879A JPS5640243A (en) 1979-09-11 1979-09-11 Mask alignment

Publications (2)

Publication Number Publication Date
JPS5640243A true JPS5640243A (en) 1981-04-16
JPS6327847B2 JPS6327847B2 (enrdf_load_stackoverflow) 1988-06-06

Family

ID=14703598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11710879A Granted JPS5640243A (en) 1979-09-11 1979-09-11 Mask alignment

Country Status (1)

Country Link
JP (1) JPS5640243A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839015A (ja) * 1981-09-01 1983-03-07 Pioneer Electronic Corp 半導体装置の製造方法
JPS5875836A (ja) * 1981-10-30 1983-05-07 Matsushita Electric Ind Co Ltd 集積回路のマスク合せ方法
JPS61295503A (ja) * 1985-06-25 1986-12-26 Seikosha Co Ltd カラ−フィルタの製造方法
JPS61295505A (ja) * 1985-06-25 1986-12-26 Seikosha Co Ltd カラ−フイルタの製造方法
JPS6214102A (ja) * 1985-07-11 1987-01-22 Seikosha Co Ltd カラーフイルタ製造用フオトマスク

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839015A (ja) * 1981-09-01 1983-03-07 Pioneer Electronic Corp 半導体装置の製造方法
JPS5875836A (ja) * 1981-10-30 1983-05-07 Matsushita Electric Ind Co Ltd 集積回路のマスク合せ方法
JPS61295503A (ja) * 1985-06-25 1986-12-26 Seikosha Co Ltd カラ−フィルタの製造方法
JPS61295505A (ja) * 1985-06-25 1986-12-26 Seikosha Co Ltd カラ−フイルタの製造方法
JPS6214102A (ja) * 1985-07-11 1987-01-22 Seikosha Co Ltd カラーフイルタ製造用フオトマスク

Also Published As

Publication number Publication date
JPS6327847B2 (enrdf_load_stackoverflow) 1988-06-06

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