JPS5638476A - Etching method of thick film - Google Patents
Etching method of thick filmInfo
- Publication number
- JPS5638476A JPS5638476A JP11410279A JP11410279A JPS5638476A JP S5638476 A JPS5638476 A JP S5638476A JP 11410279 A JP11410279 A JP 11410279A JP 11410279 A JP11410279 A JP 11410279A JP S5638476 A JPS5638476 A JP S5638476A
- Authority
- JP
- Japan
- Prior art keywords
- thick film
- film
- resist film
- unnecessary portion
- org
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
PURPOSE: To form minute thick film patterns, by a metod wherein a thick film and a photoresist layer insoluble in an org. solvent are formed on a substrate and the resist film corresponding to an unnecessary portion of the thick film is removed by exposing and developing and, thereafter, etching is carried out by a solution containing terpineol in a predetermined cocn.
CONSTITUTION: A thick film 2 and a resist film 3 insoluble in an org. solvent are formed on an insulating substrate 1. In order to remove an unnesessary portion of the thick film 2, the resist film 3 is exposed and developed to remove the resist film 3 corresponding to the unnesessary portion of the thick film 2 to expose the unnecessary portion. Subsequently, the unnecessary portion of the thick film is etched. To carry out this etching procedure, an etching solution of an org. solvent containing 5W100% of terpineol (containing α-,β- and γ-isomer mixture) is immersed in a spongelike member and puffed or sprayed and blowed on under high pressure to melt and remove said unnecessary portion. By peeling and baking the resist film 3 remaining on the thick film 2, the highly accurate patterning is easily carried out.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54114102A JPS5915510B2 (en) | 1979-09-07 | 1979-09-07 | Thick film etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54114102A JPS5915510B2 (en) | 1979-09-07 | 1979-09-07 | Thick film etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5638476A true JPS5638476A (en) | 1981-04-13 |
JPS5915510B2 JPS5915510B2 (en) | 1984-04-10 |
Family
ID=14629163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54114102A Expired JPS5915510B2 (en) | 1979-09-07 | 1979-09-07 | Thick film etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5915510B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008171790A (en) * | 2007-01-08 | 2008-07-24 | Tatung Co | Manufacturing method of field emission element spacer, and spacer base material |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5382189A (en) * | 1976-12-27 | 1978-07-20 | Hamasawa Kogyo:Kk | Solar cell |
JPS5461887A (en) * | 1977-10-26 | 1979-05-18 | Sharp Corp | Solar battery device |
-
1979
- 1979-09-07 JP JP54114102A patent/JPS5915510B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5382189A (en) * | 1976-12-27 | 1978-07-20 | Hamasawa Kogyo:Kk | Solar cell |
JPS5461887A (en) * | 1977-10-26 | 1979-05-18 | Sharp Corp | Solar battery device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008171790A (en) * | 2007-01-08 | 2008-07-24 | Tatung Co | Manufacturing method of field emission element spacer, and spacer base material |
Also Published As
Publication number | Publication date |
---|---|
JPS5915510B2 (en) | 1984-04-10 |
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