JPS6425552A - Pattern forming method - Google Patents

Pattern forming method

Info

Publication number
JPS6425552A
JPS6425552A JP18105487A JP18105487A JPS6425552A JP S6425552 A JPS6425552 A JP S6425552A JP 18105487 A JP18105487 A JP 18105487A JP 18105487 A JP18105487 A JP 18105487A JP S6425552 A JPS6425552 A JP S6425552A
Authority
JP
Japan
Prior art keywords
pattern
conductor film
resist
thereafter
resist pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18105487A
Other languages
Japanese (ja)
Inventor
Takashi Suzuki
Akio Mimura
Nobutake Konishi
Yoshikazu Hosokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18105487A priority Critical patent/JPS6425552A/en
Publication of JPS6425552A publication Critical patent/JPS6425552A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To perform highly accurate patterning at a good yield rate, by protecting the corrosion of a first conductor film due to chemical etching of a second conductor film by the inverted pattern of a first resist pattern, i.e., the mask pattern of the second conductor film. CONSTITUTION:The pattern of a first conductor film (e.g., Al) 2 is formed on a substrate 1. A first resist pattern 3 is formed on the film 2. Thereafter, a second conductor film 4 is attached on the substrate 1. Then, a second resist pattern 5 is formed on the second conductor film 4. Thereafter, the device is immersed into aqua-regia based solution. The second conductor film 4 at the exposed part is removed. Then the first resist pattern 3 and the second resist pattern 5 are dissolved and removed with a resist stripper. Thereafter, the device is washed with methanol. The resist stripper is dissolved and removed. Only a second conductor film pattern 3' is made to remain. The pattern of the second conductor film is formed on the first conductor film pattern 1. Thus the minute pattern can be obtained highly accurately at a good yield rate.
JP18105487A 1987-07-22 1987-07-22 Pattern forming method Pending JPS6425552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18105487A JPS6425552A (en) 1987-07-22 1987-07-22 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18105487A JPS6425552A (en) 1987-07-22 1987-07-22 Pattern forming method

Publications (1)

Publication Number Publication Date
JPS6425552A true JPS6425552A (en) 1989-01-27

Family

ID=16093970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18105487A Pending JPS6425552A (en) 1987-07-22 1987-07-22 Pattern forming method

Country Status (1)

Country Link
JP (1) JPS6425552A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5230319A (en) * 1990-10-05 1993-07-27 Toyota Jidosha Kabushiki Kaisha Apparatus for detecting malfunction in evaporated fuel purge system
US5237979A (en) * 1991-09-02 1993-08-24 Toyota Jidosha Kabushiki Kaisha Evaporative fuel control apparatus of internal combustion engine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5230319A (en) * 1990-10-05 1993-07-27 Toyota Jidosha Kabushiki Kaisha Apparatus for detecting malfunction in evaporated fuel purge system
US5237979A (en) * 1991-09-02 1993-08-24 Toyota Jidosha Kabushiki Kaisha Evaporative fuel control apparatus of internal combustion engine

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