JPS53128279A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53128279A JPS53128279A JP4291377A JP4291377A JPS53128279A JP S53128279 A JPS53128279 A JP S53128279A JP 4291377 A JP4291377 A JP 4291377A JP 4291377 A JP4291377 A JP 4291377A JP S53128279 A JPS53128279 A JP S53128279A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- substrate
- rssist
- peeling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To obtain fine patterns with high accuracy by coating a rssist on a substrate, opening holes therein through exposing and developing, etching the substrate with this as a mask, thereafter evaporating a metal film then peeling the resist.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4291377A JPS53128279A (en) | 1977-04-14 | 1977-04-14 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4291377A JPS53128279A (en) | 1977-04-14 | 1977-04-14 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53128279A true JPS53128279A (en) | 1978-11-09 |
Family
ID=12649254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4291377A Pending JPS53128279A (en) | 1977-04-14 | 1977-04-14 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53128279A (en) |
-
1977
- 1977-04-14 JP JP4291377A patent/JPS53128279A/en active Pending
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