JPS53128279A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53128279A
JPS53128279A JP4291377A JP4291377A JPS53128279A JP S53128279 A JPS53128279 A JP S53128279A JP 4291377 A JP4291377 A JP 4291377A JP 4291377 A JP4291377 A JP 4291377A JP S53128279 A JPS53128279 A JP S53128279A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
rssist
peeling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4291377A
Other languages
Japanese (ja)
Inventor
Wahei Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4291377A priority Critical patent/JPS53128279A/en
Publication of JPS53128279A publication Critical patent/JPS53128279A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To obtain fine patterns with high accuracy by coating a rssist on a substrate, opening holes therein through exposing and developing, etching the substrate with this as a mask, thereafter evaporating a metal film then peeling the resist.
COPYRIGHT: (C)1978,JPO&Japio
JP4291377A 1977-04-14 1977-04-14 Production of semiconductor device Pending JPS53128279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4291377A JPS53128279A (en) 1977-04-14 1977-04-14 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4291377A JPS53128279A (en) 1977-04-14 1977-04-14 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53128279A true JPS53128279A (en) 1978-11-09

Family

ID=12649254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4291377A Pending JPS53128279A (en) 1977-04-14 1977-04-14 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53128279A (en)

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