JPS5637651A - Manufacturing of semiconductor device - Google Patents

Manufacturing of semiconductor device

Info

Publication number
JPS5637651A
JPS5637651A JP11323279A JP11323279A JPS5637651A JP S5637651 A JPS5637651 A JP S5637651A JP 11323279 A JP11323279 A JP 11323279A JP 11323279 A JP11323279 A JP 11323279A JP S5637651 A JPS5637651 A JP S5637651A
Authority
JP
Japan
Prior art keywords
mask
si3n4
sio2
layer
wirings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11323279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6148260B2 (enrdf_load_stackoverflow
Inventor
Rokuro Yoshizawa
Satoshi Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP11323279A priority Critical patent/JPS5637651A/ja
Priority to US06/183,813 priority patent/US4371423A/en
Publication of JPS5637651A publication Critical patent/JPS5637651A/ja
Publication of JPS6148260B2 publication Critical patent/JPS6148260B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11323279A 1979-09-04 1979-09-04 Manufacturing of semiconductor device Granted JPS5637651A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11323279A JPS5637651A (en) 1979-09-04 1979-09-04 Manufacturing of semiconductor device
US06/183,813 US4371423A (en) 1979-09-04 1980-09-03 Method of manufacturing semiconductor device utilizing a lift-off technique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11323279A JPS5637651A (en) 1979-09-04 1979-09-04 Manufacturing of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5637651A true JPS5637651A (en) 1981-04-11
JPS6148260B2 JPS6148260B2 (enrdf_load_stackoverflow) 1986-10-23

Family

ID=14606905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11323279A Granted JPS5637651A (en) 1979-09-04 1979-09-04 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5637651A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743120U (ja) * 1993-12-31 1995-08-18 美貴子 出口 卓上カレンダ−

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743120U (ja) * 1993-12-31 1995-08-18 美貴子 出口 卓上カレンダ−

Also Published As

Publication number Publication date
JPS6148260B2 (enrdf_load_stackoverflow) 1986-10-23

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