JPS5630750A - Bipolar transistor and manufacture thereof - Google Patents
Bipolar transistor and manufacture thereofInfo
- Publication number
- JPS5630750A JPS5630750A JP10624779A JP10624779A JPS5630750A JP S5630750 A JPS5630750 A JP S5630750A JP 10624779 A JP10624779 A JP 10624779A JP 10624779 A JP10624779 A JP 10624779A JP S5630750 A JPS5630750 A JP S5630750A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- base layer
- shallow
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10624779A JPS5630750A (en) | 1979-08-21 | 1979-08-21 | Bipolar transistor and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10624779A JPS5630750A (en) | 1979-08-21 | 1979-08-21 | Bipolar transistor and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5630750A true JPS5630750A (en) | 1981-03-27 |
JPS6360550B2 JPS6360550B2 (enrdf_load_stackoverflow) | 1988-11-24 |
Family
ID=14428770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10624779A Granted JPS5630750A (en) | 1979-08-21 | 1979-08-21 | Bipolar transistor and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5630750A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60195968A (ja) * | 1984-03-19 | 1985-10-04 | Hitachi Ltd | 半導体装置 |
US4695862A (en) * | 1984-09-20 | 1987-09-22 | Sony Corporation | Semiconductor apparatus |
JPS63289861A (ja) * | 1987-05-21 | 1988-11-28 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JPH02148848A (ja) * | 1988-11-30 | 1990-06-07 | Nec Corp | 半導体装置の製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08323693A (ja) * | 1995-05-25 | 1996-12-10 | Mitsubishi Cable Ind Ltd | 軟質管体の切断台 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3083441A (en) * | 1959-04-13 | 1963-04-02 | Texas Instruments Inc | Method for fabricating transistors |
-
1979
- 1979-08-21 JP JP10624779A patent/JPS5630750A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3083441A (en) * | 1959-04-13 | 1963-04-02 | Texas Instruments Inc | Method for fabricating transistors |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60195968A (ja) * | 1984-03-19 | 1985-10-04 | Hitachi Ltd | 半導体装置 |
US4695862A (en) * | 1984-09-20 | 1987-09-22 | Sony Corporation | Semiconductor apparatus |
JPS63289861A (ja) * | 1987-05-21 | 1988-11-28 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JPH02148848A (ja) * | 1988-11-30 | 1990-06-07 | Nec Corp | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6360550B2 (enrdf_load_stackoverflow) | 1988-11-24 |
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