JPS5627975A - Manufacture of compound semiconductor device - Google Patents

Manufacture of compound semiconductor device

Info

Publication number
JPS5627975A
JPS5627975A JP10397879A JP10397879A JPS5627975A JP S5627975 A JPS5627975 A JP S5627975A JP 10397879 A JP10397879 A JP 10397879A JP 10397879 A JP10397879 A JP 10397879A JP S5627975 A JPS5627975 A JP S5627975A
Authority
JP
Japan
Prior art keywords
resist mask
type
hetero junction
type layer
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10397879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6114677B2 (enrdf_load_stackoverflow
Inventor
Yasuhiro Ishii
Noriyuki Shimano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP10397879A priority Critical patent/JPS5627975A/ja
Publication of JPS5627975A publication Critical patent/JPS5627975A/ja
Publication of JPS6114677B2 publication Critical patent/JPS6114677B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP10397879A 1979-08-17 1979-08-17 Manufacture of compound semiconductor device Granted JPS5627975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10397879A JPS5627975A (en) 1979-08-17 1979-08-17 Manufacture of compound semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10397879A JPS5627975A (en) 1979-08-17 1979-08-17 Manufacture of compound semiconductor device

Publications (2)

Publication Number Publication Date
JPS5627975A true JPS5627975A (en) 1981-03-18
JPS6114677B2 JPS6114677B2 (enrdf_load_stackoverflow) 1986-04-19

Family

ID=14368404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10397879A Granted JPS5627975A (en) 1979-08-17 1979-08-17 Manufacture of compound semiconductor device

Country Status (1)

Country Link
JP (1) JPS5627975A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334978A (ja) * 1986-07-29 1988-02-15 Agency Of Ind Science & Technol 薄膜接合電界効果素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334978A (ja) * 1986-07-29 1988-02-15 Agency Of Ind Science & Technol 薄膜接合電界効果素子

Also Published As

Publication number Publication date
JPS6114677B2 (enrdf_load_stackoverflow) 1986-04-19

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