JPS5624948A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5624948A JPS5624948A JP10099179A JP10099179A JPS5624948A JP S5624948 A JPS5624948 A JP S5624948A JP 10099179 A JP10099179 A JP 10099179A JP 10099179 A JP10099179 A JP 10099179A JP S5624948 A JPS5624948 A JP S5624948A
- Authority
- JP
- Japan
- Prior art keywords
- type
- wires
- layers
- difference
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10099179A JPS5624948A (en) | 1979-08-07 | 1979-08-07 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10099179A JPS5624948A (en) | 1979-08-07 | 1979-08-07 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5624948A true JPS5624948A (en) | 1981-03-10 |
JPS6154255B2 JPS6154255B2 (enrdf_load_stackoverflow) | 1986-11-21 |
Family
ID=14288766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10099179A Granted JPS5624948A (en) | 1979-08-07 | 1979-08-07 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5624948A (enrdf_load_stackoverflow) |
-
1979
- 1979-08-07 JP JP10099179A patent/JPS5624948A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6154255B2 (enrdf_load_stackoverflow) | 1986-11-21 |
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