JPS5618446A - Formation of spherical salient electrode - Google Patents
Formation of spherical salient electrodeInfo
- Publication number
- JPS5618446A JPS5618446A JP9376079A JP9376079A JPS5618446A JP S5618446 A JPS5618446 A JP S5618446A JP 9376079 A JP9376079 A JP 9376079A JP 9376079 A JP9376079 A JP 9376079A JP S5618446 A JPS5618446 A JP S5618446A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- film
- base
- metal
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9376079A JPS5618446A (en) | 1979-07-25 | 1979-07-25 | Formation of spherical salient electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9376079A JPS5618446A (en) | 1979-07-25 | 1979-07-25 | Formation of spherical salient electrode |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5618446A true JPS5618446A (en) | 1981-02-21 |
JPS6155777B2 JPS6155777B2 (ja) | 1986-11-29 |
Family
ID=14091380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9376079A Granted JPS5618446A (en) | 1979-07-25 | 1979-07-25 | Formation of spherical salient electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5618446A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60183315A (ja) * | 1984-02-27 | 1985-09-18 | 共和機械株式会社 | 卵の定量包装方法 |
JPH02244722A (ja) * | 1989-03-17 | 1990-09-28 | Casio Comput Co Ltd | 半導体素子のバンプ電極形成方法 |
US5244833A (en) * | 1989-07-26 | 1993-09-14 | International Business Machines Corporation | Method for manufacturing an integrated circuit chip bump electrode using a polymer layer and a photoresist layer |
US5376584A (en) * | 1992-12-31 | 1994-12-27 | International Business Machines Corporation | Process of making pad structure for solder ball limiting metallurgy having reduced edge stress |
-
1979
- 1979-07-25 JP JP9376079A patent/JPS5618446A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60183315A (ja) * | 1984-02-27 | 1985-09-18 | 共和機械株式会社 | 卵の定量包装方法 |
JPH0260566B2 (ja) * | 1984-02-27 | 1990-12-17 | Kyowa Machine | |
JPH02244722A (ja) * | 1989-03-17 | 1990-09-28 | Casio Comput Co Ltd | 半導体素子のバンプ電極形成方法 |
US5244833A (en) * | 1989-07-26 | 1993-09-14 | International Business Machines Corporation | Method for manufacturing an integrated circuit chip bump electrode using a polymer layer and a photoresist layer |
US5376584A (en) * | 1992-12-31 | 1994-12-27 | International Business Machines Corporation | Process of making pad structure for solder ball limiting metallurgy having reduced edge stress |
Also Published As
Publication number | Publication date |
---|---|
JPS6155777B2 (ja) | 1986-11-29 |
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