JPS56165339A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS56165339A JPS56165339A JP6928280A JP6928280A JPS56165339A JP S56165339 A JPS56165339 A JP S56165339A JP 6928280 A JP6928280 A JP 6928280A JP 6928280 A JP6928280 A JP 6928280A JP S56165339 A JPS56165339 A JP S56165339A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- silicon oxide
- wiring
- coated
- layer wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6928280A JPS56165339A (en) | 1980-05-23 | 1980-05-23 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6928280A JPS56165339A (en) | 1980-05-23 | 1980-05-23 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56165339A true JPS56165339A (en) | 1981-12-18 |
| JPS6239823B2 JPS6239823B2 (en, 2012) | 1987-08-25 |
Family
ID=13398111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6928280A Granted JPS56165339A (en) | 1980-05-23 | 1980-05-23 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56165339A (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60175440A (ja) * | 1984-02-20 | 1985-09-09 | Matsushita Electronics Corp | 半導体装置の製造方法 |
| US5266835A (en) * | 1988-02-02 | 1993-11-30 | National Semiconductor Corporation | Semiconductor structure having a barrier layer disposed within openings of a dielectric layer |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0169624U (en, 2012) * | 1987-10-28 | 1989-05-09 | ||
| JPH0169623U (en, 2012) * | 1987-10-28 | 1989-05-09 |
-
1980
- 1980-05-23 JP JP6928280A patent/JPS56165339A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60175440A (ja) * | 1984-02-20 | 1985-09-09 | Matsushita Electronics Corp | 半導体装置の製造方法 |
| US5266835A (en) * | 1988-02-02 | 1993-11-30 | National Semiconductor Corporation | Semiconductor structure having a barrier layer disposed within openings of a dielectric layer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239823B2 (en, 2012) | 1987-08-25 |
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