JPS56162336A - Air conditioner - Google Patents
Air conditionerInfo
- Publication number
- JPS56162336A JPS56162336A JP6394080A JP6394080A JPS56162336A JP S56162336 A JPS56162336 A JP S56162336A JP 6394080 A JP6394080 A JP 6394080A JP 6394080 A JP6394080 A JP 6394080A JP S56162336 A JPS56162336 A JP S56162336A
- Authority
- JP
- Japan
- Prior art keywords
- air
- region
- working
- blown
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6394080A JPS56162336A (en) | 1980-05-16 | 1980-05-16 | Air conditioner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6394080A JPS56162336A (en) | 1980-05-16 | 1980-05-16 | Air conditioner |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61059217A Division JPS61211642A (ja) | 1986-03-19 | 1986-03-19 | 半導体製造用空気清浄化設備 |
JP61059218A Division JPS61211643A (ja) | 1986-03-19 | 1986-03-19 | 空気調和装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56162336A true JPS56162336A (en) | 1981-12-14 |
JPH0330060B2 JPH0330060B2 (ko) | 1991-04-26 |
Family
ID=13243841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6394080A Granted JPS56162336A (en) | 1980-05-16 | 1980-05-16 | Air conditioner |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56162336A (ko) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58127033A (ja) * | 1982-01-25 | 1983-07-28 | Hitachi Ltd | 清浄室装置 |
JPS60107820A (ja) * | 1983-11-16 | 1985-06-13 | Hitachi Ltd | ダウンフロ−型無塵室 |
JPS62276828A (ja) * | 1986-02-20 | 1987-12-01 | Nec Corp | 半導体製造装置 |
JPH10311556A (ja) * | 1997-05-14 | 1998-11-24 | Sanki Eng Co Ltd | 空調方法及び空調装置 |
JP2002089920A (ja) * | 2000-09-19 | 2002-03-27 | Taisei Corp | クリーンルーム及び半導体デバイスもしくは液晶ディスプレーの製造方法 |
JP2015224819A (ja) * | 2014-05-28 | 2015-12-14 | ダイダン株式会社 | コンタミネーション防止可能な安全キャビネット |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5037451A (ko) * | 1973-08-03 | 1975-04-08 |
-
1980
- 1980-05-16 JP JP6394080A patent/JPS56162336A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5037451A (ko) * | 1973-08-03 | 1975-04-08 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58127033A (ja) * | 1982-01-25 | 1983-07-28 | Hitachi Ltd | 清浄室装置 |
JPS6314257B2 (ko) * | 1982-01-25 | 1988-03-30 | Hitachi Ltd | |
JPS60107820A (ja) * | 1983-11-16 | 1985-06-13 | Hitachi Ltd | ダウンフロ−型無塵室 |
JPS62276828A (ja) * | 1986-02-20 | 1987-12-01 | Nec Corp | 半導体製造装置 |
JPH10311556A (ja) * | 1997-05-14 | 1998-11-24 | Sanki Eng Co Ltd | 空調方法及び空調装置 |
JP2002089920A (ja) * | 2000-09-19 | 2002-03-27 | Taisei Corp | クリーンルーム及び半導体デバイスもしくは液晶ディスプレーの製造方法 |
JP4535477B2 (ja) * | 2000-09-19 | 2010-09-01 | 大成建設株式会社 | クリーンルーム及び半導体デバイスもしくは液晶ディスプレーの製造方法 |
JP2015224819A (ja) * | 2014-05-28 | 2015-12-14 | ダイダン株式会社 | コンタミネーション防止可能な安全キャビネット |
Also Published As
Publication number | Publication date |
---|---|
JPH0330060B2 (ko) | 1991-04-26 |
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