JPS56161655A - Multilayer aluminum wiring for semiconductor device - Google Patents

Multilayer aluminum wiring for semiconductor device

Info

Publication number
JPS56161655A
JPS56161655A JP6411980A JP6411980A JPS56161655A JP S56161655 A JPS56161655 A JP S56161655A JP 6411980 A JP6411980 A JP 6411980A JP 6411980 A JP6411980 A JP 6411980A JP S56161655 A JPS56161655 A JP S56161655A
Authority
JP
Japan
Prior art keywords
layer
aluminum
film
thin
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6411980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6346979B2 (enrdf_load_stackoverflow
Inventor
Yasunobu Tanizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6411980A priority Critical patent/JPS56161655A/ja
Publication of JPS56161655A publication Critical patent/JPS56161655A/ja
Publication of JPS6346979B2 publication Critical patent/JPS6346979B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/097—Glass compositions containing silica with 40% to 90% silica, by weight containing phosphorus, niobium or tantalum

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6411980A 1980-05-16 1980-05-16 Multilayer aluminum wiring for semiconductor device Granted JPS56161655A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6411980A JPS56161655A (en) 1980-05-16 1980-05-16 Multilayer aluminum wiring for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6411980A JPS56161655A (en) 1980-05-16 1980-05-16 Multilayer aluminum wiring for semiconductor device

Publications (2)

Publication Number Publication Date
JPS56161655A true JPS56161655A (en) 1981-12-12
JPS6346979B2 JPS6346979B2 (enrdf_load_stackoverflow) 1988-09-20

Family

ID=13248851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6411980A Granted JPS56161655A (en) 1980-05-16 1980-05-16 Multilayer aluminum wiring for semiconductor device

Country Status (1)

Country Link
JP (1) JPS56161655A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58197846A (ja) * 1982-05-14 1983-11-17 Oki Electric Ind Co Ltd 多層配線構造体の製造方法
JPS59117236A (ja) * 1982-12-24 1984-07-06 Hitachi Ltd 半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58197846A (ja) * 1982-05-14 1983-11-17 Oki Electric Ind Co Ltd 多層配線構造体の製造方法
JPS59117236A (ja) * 1982-12-24 1984-07-06 Hitachi Ltd 半導体装置

Also Published As

Publication number Publication date
JPS6346979B2 (enrdf_load_stackoverflow) 1988-09-20

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