JPS56161642A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS56161642A JPS56161642A JP6567880A JP6567880A JPS56161642A JP S56161642 A JPS56161642 A JP S56161642A JP 6567880 A JP6567880 A JP 6567880A JP 6567880 A JP6567880 A JP 6567880A JP S56161642 A JPS56161642 A JP S56161642A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- measure
- pattern
- foreign matters
- photoresist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6567880A JPS56161642A (en) | 1980-05-15 | 1980-05-15 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6567880A JPS56161642A (en) | 1980-05-15 | 1980-05-15 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56161642A true JPS56161642A (en) | 1981-12-12 |
Family
ID=13293894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6567880A Pending JPS56161642A (en) | 1980-05-15 | 1980-05-15 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56161642A (ja) |
-
1980
- 1980-05-15 JP JP6567880A patent/JPS56161642A/ja active Pending
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