JPS56158904A - Method and device for measuring surface strain of surface having light reflexibility - Google Patents

Method and device for measuring surface strain of surface having light reflexibility

Info

Publication number
JPS56158904A
JPS56158904A JP6238780A JP6238780A JPS56158904A JP S56158904 A JPS56158904 A JP S56158904A JP 6238780 A JP6238780 A JP 6238780A JP 6238780 A JP6238780 A JP 6238780A JP S56158904 A JPS56158904 A JP S56158904A
Authority
JP
Japan
Prior art keywords
light
strain
measured
detected
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6238780A
Other languages
Japanese (ja)
Inventor
Hideo Kawahara
Masato Hyodo
Koichi Ataka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP6238780A priority Critical patent/JPS56158904A/en
Publication of JPS56158904A publication Critical patent/JPS56158904A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To measure accurately and rapidly the strain of a surface to be measured by irradiating the surface to be measured with light beams and by detecting the deviation of a reflected beam from a reference position. CONSTITUTION:A frame body 5 stood upright on a horizontally movable base 4 in parallel to the surface of glass sample 1 is provided with photodetectors 7 and five light sources 6, such as lasers, which emit parallel light beams at constant intervals vertically. In this case, the angle theta contained in between a light beam L1 from one light source 6 and its reflected beam L2 when the L1 reflected by the surface of the sample 1 and the L2 enters photodetector 7 should be about 0.7 deg.. It is detected by a float glass plate of 12mm. thickness having less strain, and from the position of a photodetector 7 having detected the peak quantity of light and that of another photodetector 7 having detected the peak quantity of light on the sample surface 1, the strain of the surface 1 to be measured is calculated. Thus, the strain of the surface 1 to be measured is measured accurately and rapidly.
JP6238780A 1980-05-12 1980-05-12 Method and device for measuring surface strain of surface having light reflexibility Pending JPS56158904A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6238780A JPS56158904A (en) 1980-05-12 1980-05-12 Method and device for measuring surface strain of surface having light reflexibility

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6238780A JPS56158904A (en) 1980-05-12 1980-05-12 Method and device for measuring surface strain of surface having light reflexibility

Publications (1)

Publication Number Publication Date
JPS56158904A true JPS56158904A (en) 1981-12-08

Family

ID=13198657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6238780A Pending JPS56158904A (en) 1980-05-12 1980-05-12 Method and device for measuring surface strain of surface having light reflexibility

Country Status (1)

Country Link
JP (1) JPS56158904A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005345281A (en) * 2004-06-03 2005-12-15 Topcon Corp Surface inspection device
CN109668861A (en) * 2018-12-25 2019-04-23 江苏日托光伏科技股份有限公司 The component backboard method of inspection after a kind of MWT lamination

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005345281A (en) * 2004-06-03 2005-12-15 Topcon Corp Surface inspection device
JP4531447B2 (en) * 2004-06-03 2010-08-25 株式会社トプコン Surface inspection device
CN109668861A (en) * 2018-12-25 2019-04-23 江苏日托光伏科技股份有限公司 The component backboard method of inspection after a kind of MWT lamination

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