JPS56157846A - Method for forming on both surfaces of heating part structured in bridging state - Google Patents

Method for forming on both surfaces of heating part structured in bridging state

Info

Publication number
JPS56157846A
JPS56157846A JP6139380A JP6139380A JPS56157846A JP S56157846 A JPS56157846 A JP S56157846A JP 6139380 A JP6139380 A JP 6139380A JP 6139380 A JP6139380 A JP 6139380A JP S56157846 A JPS56157846 A JP S56157846A
Authority
JP
Japan
Prior art keywords
film
bridging state
bridging
spinner
heating part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6139380A
Other languages
Japanese (ja)
Other versions
JPS6127704B2 (en
Inventor
Mitsuteru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP6139380A priority Critical patent/JPS56157846A/en
Publication of JPS56157846A publication Critical patent/JPS56157846A/en
Publication of JPS6127704B2 publication Critical patent/JPS6127704B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Surface Heating Bodies (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To form a porous film in a manner to hold a heating part in a bridging state, by a method wherein a liquefied film-forming material is applied on a heating substance, structured in a bridging state, through the spin of a spinner. CONSTITUTION:After SiO2 layer 10 is formed on a surface of an Si wafer, the SiO2 layer is etched with an ammonia fluoride etching liquid, and the Si water 1 with silver glycol etching liquid to form a channel having an appropriate depth. Said channel is then etched with ethylenediamine water solution to form a cavity 2 and slits 10a and 10b, and SiO2 film bridge 10a is formed. A material, in which Pt and Pd are blended, is spattered on so formed substrate to form a conductive layer 13, and a heating part 13 is formed in a bridging state. On the heating substance structured in a bridging state, a liquefied substance, in which, for example, aluminum particles, water, and binder are mixed together, is applied with a spinner spun. Viscosity of a film-forming material and the number of revolutions of the spinner are adjusted thereupon, and a film thickness is regulated so that the bridging structure can be maintained.
JP6139380A 1980-05-09 1980-05-09 Method for forming on both surfaces of heating part structured in bridging state Granted JPS56157846A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6139380A JPS56157846A (en) 1980-05-09 1980-05-09 Method for forming on both surfaces of heating part structured in bridging state

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6139380A JPS56157846A (en) 1980-05-09 1980-05-09 Method for forming on both surfaces of heating part structured in bridging state

Publications (2)

Publication Number Publication Date
JPS56157846A true JPS56157846A (en) 1981-12-05
JPS6127704B2 JPS6127704B2 (en) 1986-06-26

Family

ID=13169862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6139380A Granted JPS56157846A (en) 1980-05-09 1980-05-09 Method for forming on both surfaces of heating part structured in bridging state

Country Status (1)

Country Link
JP (1) JPS56157846A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62220850A (en) * 1986-03-24 1987-09-29 Ricoh Seiki Kk Atmosphere detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62220850A (en) * 1986-03-24 1987-09-29 Ricoh Seiki Kk Atmosphere detector

Also Published As

Publication number Publication date
JPS6127704B2 (en) 1986-06-26

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