JPS56150303A - Surface form measuring device using scan-type electronic microscope - Google Patents

Surface form measuring device using scan-type electronic microscope

Info

Publication number
JPS56150303A
JPS56150303A JP5357480A JP5357480A JPS56150303A JP S56150303 A JPS56150303 A JP S56150303A JP 5357480 A JP5357480 A JP 5357480A JP 5357480 A JP5357480 A JP 5357480A JP S56150303 A JPS56150303 A JP S56150303A
Authority
JP
Japan
Prior art keywords
sample
converter
substance
displayed
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5357480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331721B2 (OSRAM
Inventor
Hisayoshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tokyo NUC
Original Assignee
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tokyo NUC filed Critical University of Tokyo NUC
Priority to JP5357480A priority Critical patent/JPS56150303A/ja
Publication of JPS56150303A publication Critical patent/JPS56150303A/ja
Publication of JPS6331721B2 publication Critical patent/JPS6331721B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP5357480A 1980-04-24 1980-04-24 Surface form measuring device using scan-type electronic microscope Granted JPS56150303A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5357480A JPS56150303A (en) 1980-04-24 1980-04-24 Surface form measuring device using scan-type electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5357480A JPS56150303A (en) 1980-04-24 1980-04-24 Surface form measuring device using scan-type electronic microscope

Publications (2)

Publication Number Publication Date
JPS56150303A true JPS56150303A (en) 1981-11-20
JPS6331721B2 JPS6331721B2 (OSRAM) 1988-06-27

Family

ID=12946597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5357480A Granted JPS56150303A (en) 1980-04-24 1980-04-24 Surface form measuring device using scan-type electronic microscope

Country Status (1)

Country Link
JP (1) JPS56150303A (OSRAM)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238707A (ja) * 1984-05-11 1985-11-27 Mitsubishi Electric Corp パタ−ン段差測定器
JPS62213054A (ja) * 1986-03-14 1987-09-18 Res Dev Corp Of Japan 走査型電子顕微鏡による表面粗さ測定装置
JPS63215909A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215910A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215908A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215907A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定装置
JPS63277911A (ja) * 1987-03-04 1988-11-15 Erionikusu:Kk 断面測定方法
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238707A (ja) * 1984-05-11 1985-11-27 Mitsubishi Electric Corp パタ−ン段差測定器
JPS62213054A (ja) * 1986-03-14 1987-09-18 Res Dev Corp Of Japan 走査型電子顕微鏡による表面粗さ測定装置
JPS63215909A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215910A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215908A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定方法
JPS63215907A (ja) * 1987-03-04 1988-09-08 Erionikusu:Kk 断面測定装置
JPS63277911A (ja) * 1987-03-04 1988-11-15 Erionikusu:Kk 断面測定方法
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor

Also Published As

Publication number Publication date
JPS6331721B2 (OSRAM) 1988-06-27

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