JPS5583144A - Scanning electronic microscope or similar equipment - Google Patents

Scanning electronic microscope or similar equipment

Info

Publication number
JPS5583144A
JPS5583144A JP15648378A JP15648378A JPS5583144A JP S5583144 A JPS5583144 A JP S5583144A JP 15648378 A JP15648378 A JP 15648378A JP 15648378 A JP15648378 A JP 15648378A JP S5583144 A JPS5583144 A JP S5583144A
Authority
JP
Japan
Prior art keywords
vacuum
specimen
grade
similar equipment
electronic microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15648378A
Other languages
Japanese (ja)
Inventor
Seishiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15648378A priority Critical patent/JPS5583144A/en
Publication of JPS5583144A publication Critical patent/JPS5583144A/en
Pending legal-status Critical Current

Links

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To facilitate the confirmation of the grade of vacuum by indicating the grade of vacuum in the body to be exhausted on the indicator for indicating the image of specimen.
CONSTITUTION: The inside of mirror 1 is exhausted by vacuum pump 2 and the grade of vacuum is measured by vacuum meter 3. The output from secondary electron detector 4 for detecting the secondary electron emitted from the surface of specimen when scanning on the surface of specimen with focused electron beam in two dimension is provided through signal amplifier 5 to signal switching circuit 6, to indicate the image of specimen on cathode ray tube 7 in accordance with the operation of said signal switching circuit and to indicate the grade of vacuum in mirror body 1. Consequently the confirmation of vacuum in the body is facilitated.
COPYRIGHT: (C)1980,JPO&Japio
JP15648378A 1978-12-20 1978-12-20 Scanning electronic microscope or similar equipment Pending JPS5583144A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15648378A JPS5583144A (en) 1978-12-20 1978-12-20 Scanning electronic microscope or similar equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15648378A JPS5583144A (en) 1978-12-20 1978-12-20 Scanning electronic microscope or similar equipment

Publications (1)

Publication Number Publication Date
JPS5583144A true JPS5583144A (en) 1980-06-23

Family

ID=15628737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15648378A Pending JPS5583144A (en) 1978-12-20 1978-12-20 Scanning electronic microscope or similar equipment

Country Status (1)

Country Link
JP (1) JPS5583144A (en)

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