JPS56140669A - Semiconductor pressure sensor - Google Patents

Semiconductor pressure sensor

Info

Publication number
JPS56140669A
JPS56140669A JP4421580A JP4421580A JPS56140669A JP S56140669 A JPS56140669 A JP S56140669A JP 4421580 A JP4421580 A JP 4421580A JP 4421580 A JP4421580 A JP 4421580A JP S56140669 A JPS56140669 A JP S56140669A
Authority
JP
Japan
Prior art keywords
sensor
gauge resistors
diffused layers
pair
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4421580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154270B2 (enrdf_load_stackoverflow
Inventor
Toru Shinmen
Mitsuhiko Asano
Hideaki Goshima
Hirokazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP4421580A priority Critical patent/JPS56140669A/ja
Publication of JPS56140669A publication Critical patent/JPS56140669A/ja
Publication of JPS6154270B2 publication Critical patent/JPS6154270B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP4421580A 1980-04-04 1980-04-04 Semiconductor pressure sensor Granted JPS56140669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4421580A JPS56140669A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4421580A JPS56140669A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Publications (2)

Publication Number Publication Date
JPS56140669A true JPS56140669A (en) 1981-11-04
JPS6154270B2 JPS6154270B2 (enrdf_load_stackoverflow) 1986-11-21

Family

ID=12685317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4421580A Granted JPS56140669A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS56140669A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5067625A (en) * 1989-06-05 1991-11-26 Nifco Inc. Device for opening and closing lid
JP2002246545A (ja) * 2001-02-21 2002-08-30 Matsushita Electric Ind Co Ltd 半導体装置
US8695278B2 (en) 2010-05-21 2014-04-15 Fujitsu Technology Solutions Intellectual Property Gmbh Door assembly for an instrument cabinet and method for changing a hinge side of a door assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5067625A (en) * 1989-06-05 1991-11-26 Nifco Inc. Device for opening and closing lid
JP2002246545A (ja) * 2001-02-21 2002-08-30 Matsushita Electric Ind Co Ltd 半導体装置
US8695278B2 (en) 2010-05-21 2014-04-15 Fujitsu Technology Solutions Intellectual Property Gmbh Door assembly for an instrument cabinet and method for changing a hinge side of a door assembly

Also Published As

Publication number Publication date
JPS6154270B2 (enrdf_load_stackoverflow) 1986-11-21

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