JPS56135974A - Field effect semiconductor device of junction type and manufacture thereof - Google Patents
Field effect semiconductor device of junction type and manufacture thereofInfo
- Publication number
- JPS56135974A JPS56135974A JP3946080A JP3946080A JPS56135974A JP S56135974 A JPS56135974 A JP S56135974A JP 3946080 A JP3946080 A JP 3946080A JP 3946080 A JP3946080 A JP 3946080A JP S56135974 A JPS56135974 A JP S56135974A
- Authority
- JP
- Japan
- Prior art keywords
- region
- gate
- insulating film
- insulated
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005669 field effect Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53271—Conductive materials containing semiconductor material, e.g. polysilicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3946080A JPS56135974A (en) | 1980-03-27 | 1980-03-27 | Field effect semiconductor device of junction type and manufacture thereof |
| GB8109383A GB2072947B (en) | 1980-03-27 | 1981-03-25 | Junction type field effect semiconductor device and a method of fabricating the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3946080A JPS56135974A (en) | 1980-03-27 | 1980-03-27 | Field effect semiconductor device of junction type and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56135974A true JPS56135974A (en) | 1981-10-23 |
| JPS6214108B2 JPS6214108B2 (enrdf_load_stackoverflow) | 1987-03-31 |
Family
ID=12553650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3946080A Granted JPS56135974A (en) | 1980-03-27 | 1980-03-27 | Field effect semiconductor device of junction type and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56135974A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5482175A (en) * | 1977-12-14 | 1979-06-30 | Nippon Telegr & Teleph Corp <Ntt> | Field effect transistor and its manufacture |
-
1980
- 1980-03-27 JP JP3946080A patent/JPS56135974A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5482175A (en) * | 1977-12-14 | 1979-06-30 | Nippon Telegr & Teleph Corp <Ntt> | Field effect transistor and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6214108B2 (enrdf_load_stackoverflow) | 1987-03-31 |
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