JPS56135945A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS56135945A
JPS56135945A JP4087980A JP4087980A JPS56135945A JP S56135945 A JPS56135945 A JP S56135945A JP 4087980 A JP4087980 A JP 4087980A JP 4087980 A JP4087980 A JP 4087980A JP S56135945 A JPS56135945 A JP S56135945A
Authority
JP
Japan
Prior art keywords
film
grooves
multilayer wiring
nitride film
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4087980A
Other languages
Japanese (ja)
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4087980A priority Critical patent/JPS56135945A/en
Publication of JPS56135945A publication Critical patent/JPS56135945A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To provide minute multilayer wiring by providing grooves in a semiconductor layer or a metal layer film on a semiconductor substrate for oxidizing treatment and thereby filling up the grooves with the oxide of semiconductor or metal to facilitate the separation between elements and the formation of electrode wiring. CONSTITUTION:An Al film 104 and a silicon nitride film 105 are connected on to the substrate 101 having a silicon oxide film 103 selectively. The silicon nitride film and the Al film are etched sequentially by means of a resist pattern 106 and thereby the grooves are provided. When anode oxidation treatment is applied subsequently, the lateral surface of the Al film 104 is converted into alumina 111, which fills up the grooves through the change in volume. Then, the photoresist being removed, a nitride film 112 is connected, a conduction orifice 113 is provided, an Al layer 114 is further formed, and thus the multilayer wiring is formed. By this method, the separation between elements and the minute multilayer wiring can be effected with ease.
JP4087980A 1980-03-28 1980-03-28 Manufacture of semiconductor device Pending JPS56135945A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4087980A JPS56135945A (en) 1980-03-28 1980-03-28 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4087980A JPS56135945A (en) 1980-03-28 1980-03-28 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS56135945A true JPS56135945A (en) 1981-10-23

Family

ID=12592790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4087980A Pending JPS56135945A (en) 1980-03-28 1980-03-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56135945A (en)

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